Substrate Transport Timing for Targeted Abnormality Imaging
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Solution Overview
Problem
Existing substrate transport systems face a high burden of data processing when detecting abnormalities in substrate transport.
Innovation Solution
A substrate transport system that utilizes sensors and a timekeeping section to determine the timing of abnormality detection based on elapsed time, reducing unnecessary image processing by performing photography only when the substrate reaches a specific position, and using a notification system to alert administrators of any detected abnormalities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If continuous photographing is performed to detect substrate transport abnormalities, then detection reliability is improved, but data processing burden increases
Solution Approach 1:
The patent applies preliminary action by using sensors A and B to detect substrate position in advance, and using the timekeeping section to pre-calculate the expected arrival time at position C. This allows the abnormality detection unit to photograph only when the substrate is expected to arrive, rather than continuously photographing, thus reducing data processing burden while maintaining detection reliability.
Solution Approach 2:
The patent implements feedback by using the elapsed time measured by the timekeeping section to determine when photographing should occur. The system compares the actual elapsed time with expected values to determine abnormality, creating a closed-loop detection system that reduces unnecessary photographing while maintaining reliable abnormality detection.
2Measurement precision
If photographing is performed at all positions, then detection precision is improved, but loss of time increases
Solution Approach 1:
The patent applies preliminary action by pre-determining the expected arrival time of the substrate at position C using the timekeeping section and elapsed time measurement. This allows the system to photograph only at the expected arrival time rather than at all positions, reducing time for image processing while maintaining detection precision through targeted photographing at the critical moment.
Solution Approach 2:
The patent implements periodic action by photographing the substrate at position C at specific intervals based on the elapsed time measurement from sensors A and B. This periodic photographing at expected arrival times reduces the total time for image processing compared to continuous photographing, while maintaining sufficient detection precision through timely captures.
Data Source
AI summary
The system has: a transport section that transports a substrate so that the substrate reaches A position, B position, C position, the B position, and the A position in this order, a A sensor that detects presence of the substrate that has reached the A position, a B sensor that detects presence of the substrate that has reached the B position, a timekeeping section that measures elapsed time when the A sensor and the B sensor detect the presence of the substrate in this order, and an abnormality detection unit that photographs the substrate that has reached the C position, and detects presence or absence of an abnormality in transport of the substrate based on the elapsed time measured by the timekeeping section and an image obtained by the photographing.