Substrate Transport Apparatus Vertical Detection

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Solution Overview

Problem

Conventional substrate transport apparatuses face challenges in efficiently detecting substrates on overlapping holders, leading to increased costs and prolonged tact times due to the need for high-cost CCD sensors and additional operation steps.

Innovation Solution

A substrate transport apparatus with two substrate holders and drive arms that rotate in opposite directions, allowing detection from vertically above or below without dedicated sensor members, reducing costs and tact time by eliminating the need for advanced sensing techniques and additional holder movements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Difficulty of detecting and measuring

If high-resolution CCD sensors and image processing apparatus are used to detect substrates on overlapping holders from oblique directions, then detection capability is improved, but apparatus cost increases and tact time prolongs

Engineering Contradiction:

Improvesubstrate detection capabilityVSAvoidapparatus cost

Core Design Contradiction:

Difficulty of detecting and measuringVSDevice complexity

Solution Approach 1:

The patent changes the detection dimension by positioning sensors vertically above or below the substrate holders rather than using oblique directions. This dimensional change allows simple top-down or bottom-up detection without requiring complex oblique imaging systems, resolving the contradiction between detection capability and apparatus cost.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent uses the shadow or silhouette of the substrate as detected from above or below as a simplified representation for detection purposes. This copying approach eliminates the need for expensive high-resolution CCD sensors while maintaining adequate detection capability.

Inventive Principle:

Principle #26Copying

2Difficulty of detecting and measuring

If image processing is performed to determine substrate presence/absence from oblique images, then detection accuracy is improved, but tact time prolongs

Engineering Contradiction:

Improvesubstrate detection accuracyVSAvoidtact time

Core Design Contradiction:

Difficulty of detecting and measuringVSLoss of time

Solution Approach 1:

The patent replaces complex image processing operations with simple sensor detection from vertical directions. By substituting the mechanical/image processing system with a simpler sensing approach, detection accuracy is maintained while significantly reducing processing time and eliminating the need for complex image analysis.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Difficulty of detecting and measuring

If substrate holders are intentionally advanced/retreated to allow detection, then detection capability is improved, but tact time prolongs due to additional operation steps

Engineering Contradiction:

Improvesubstrate detection capabilityVSAvoidtact time

Core Design Contradiction:

Difficulty of detecting and measuringVSLoss of time

Solution Approach 1:

The patent makes the substrate holder structure serve multiple functions: it is designed with detection windows that allow both substrate holding and detection functions to be performed simultaneously from vertical directions. This eliminates the need for separate detection operations or additional advancing/retreating steps, as the holder structure itself enables detection during normal positioning.

Inventive Principle:

Principle #6Universality (Multi-functionality)

4Difficulty of detecting and measuring

If special shaped boss members are added for sensor monitoring, then detection capability is improved, but apparatus cost increases

Engineering Contradiction:

Improvesubstrate holder detection capabilityVSAvoidapparatus cost

Core Design Contradiction:

Difficulty of detecting and measuringVSDevice complexity

Solution Approach 1:

The patent extracts the detection function from the substrate holder structure itself by providing detection windows or openings in the holder. This allows sensors positioned vertically above or below to detect substrates directly without requiring additional boss members or special structural modifications, eliminating unnecessary cost increases.

Inventive Principle:

Principle #2Taking out (Extraction)

Data Source

PatentUS9346171B2Substrate transport apparatus, and system and method for manufacturing electronic device

Publication Date: 2016.05.24 CANON ANELVA CORP

AI summary

A substrate transport apparatus including a first substrate holder and a second substrate holder capable of respectively holding substrates includes a first drive arm which has first and second end portions, and is rotatable with rotation of a first drive shaft, a second drive arm which has a third end portion spaced apart from the first end portion by a first distance, and a fourth end portion spaced apart from the second end portion by a second distance, and is rotatable with rotation of a second drive shaft coaxial with the first drive shaft, two first driven arms coupled to the first substrate holder, and two second driven arms coupled to the second substrate holder.