5-Axis XYZ-Theta Substrate Transporter with Segmented Arms
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Solution Overview
Problem
Existing substrate transporters face inefficiencies in throughput and repeatability due to slow swap times and limited repeatability, particularly with SCARA robots, which also generate contamination in cleanroom environments.
Innovation Solution
A 5-axis XYZ-Theta robot design with low stiffness and reduced natural frequency of vibration, incorporating linear axis motion, independently controlled end effectors, and sealed enclosures with narrow slots and suction to minimize particulate release, allowing for faster and more precise substrate handling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If SCARA design is used to minimize particulate release, then contamination is reduced, but swap time increases and throughput decreases
Solution Approach 1:
The robot arm is divided into multiple independent segments (first robot arm segment and second robot arm segment) that can move independently. This segmentation allows the first end effector to access the chuck while the second end effector remains positioned, eliminating the need for complete retraction and reorientation cycles required by traditional SCARA designs.
Solution Approach 2:
The patent implements dynamic independent control of multiple robot arm segments with different degrees of freedom. The first robot arm segment operates on a first axis while the second segment operates on a second axis, allowing simultaneous positioning and substrate swapping operations without the kinetic constraints of traditional SCARA mechanisms.
2Object-affected harmful factors
If SCARA design is used to reduce particulate release, then contamination is minimized, but repeatability is limited to around 200 μm
Solution Approach 1:
The robot arm is divided into multiple independent segments (first robot arm segment and second robot arm segment) that can move independently. This segmentation allows the first end effector to access the chuck while the second end effector remains positioned, eliminating the need for complete retraction and reorientation cycles required by traditional SCARA designs.
Solution Approach 2:
The controller coordinates the movement of multiple robot arm segments with independent degrees of freedom, using feedback control to achieve repeatability of approximately 60 μm, significantly improving upon the 200 μm limitation of traditional SCARA systems.
3Adaptability or versatility
If traditional SCARA with two end effectors is used, then substrate swapping capability is provided, but swap time is slow due to wasted movement
Solution Approach 1:
The second end effector is pre-positioned below and oriented perpendicular to the first end effector before the substrate swap begins. This preliminary positioning allows the first end effector to freely access the substrate without requiring the second end effector to retract or reorient, eliminating wasted movement time.
Solution Approach 2:
The independent parallel axis design allows both end effectors to operate simultaneously and continuously without interruption. The first end effector can retrieve a substrate while the second end effector is already in position to place the next substrate, enabling continuous substrate swapping without the stop-and-reposition cycles required by traditional SCARA designs.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances throughput and repeatability while minimizing contamination, achieving improved substrate handling efficiency and precision, with reduced vibrational frequency contributing to higher accuracy and reduced particulate release.
Implementation Method 1
incorporating a controller with a high control cycle frequency to enhance repeatability
Data Source
AI summary
Aspects of the present disclosure describe a robot which has a controller, actuators, encoders, and mechanical components. The robot may produce motion about an X, Z, RU, RL, and Theta axes. Movements of the robot are controlled by the controller. The repeatability of the robot is improved by designing the robot such that a control cycle frequency of the controller is 50 times or more greater than a vibrational frequency of one or more of the mechanical components. In order to reduce the release of particulates, a baffled enclosure may be used. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. This abstract is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.