Long Substrate Treatment Apparatus Tension Control

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Solution Overview

Problem

Large-scale sputtering web coaters face challenges in accurately controlling the tension of long substrates during the manufacturing process, leading to issues such as slippage, vibration, and the formation of wrinkles and scratches on the substrate due to uneven thermal load distribution and tension differences across various zones.

Innovation Solution

A long substrate treatment apparatus with a two-stage tension control system, utilizing infeed-side and outfeed-side tension control roll groups and a rotary joint with gas introduction channels and sliding contact surfaces to manage gas pressure and tension uniformly across the substrate, ensuring consistent thermal load application and reduced friction.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If sputtering method is used to form metal film on heat-resistant resin film, then better bond strength is achieved, but larger thermal load is applied to the resin film causing wrinkles

Engineering Contradiction:
Improvebond strengthVSAvoidthermal load causing wrinkles
Core Design Contradiction:
StrengthVSObject-affected harmful factors

Solution Approach 1:

A gas (such as nitrogen or argon) is introduced as an intermediary substance into the gap between the can roll surface and the heat-resistant resin film. This gas layer acts as a thermal conductor to efficiently transfer heat from the film to the cooled can roll, preventing wrinkle formation while maintaining the sputtering process benefits

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The physical state of the gap between can roll and film is changed from vacuum to gas-filled by controlling gas pressure. This parameter change enhances thermal conductivity in the gap region, allowing efficient heat removal during sputtering without compromising bond strength

Inventive Principle:
Principle #35Parameter changes

2Reliability

If gas is introduced into gap regions between can roll and film to improve thermal conductance, then wrinkle formation is prevented, but gas may discharge to vacuum chamber from non-wrapped portions

Engineering Contradiction:
Improvethermal conductanceVSAvoidgas discharge to vacuum chamber
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

Gas introduction channels are positioned to discharge gas only at specific locations where the film is wrapped around the can roll. The gas discharge is localized to the wrapped portion region, preventing gas leakage into the vacuum chamber while maintaining thermal conductance where needed

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The can roll is designed with gas introduction channels and discharge holes positioned beforehand to ensure gas is discharged only at wrapped portions. This preliminary design prevents gas discharge issues before they occur during operation

Inventive Principle:
Principle #10Preliminary action

3Stability of the object's composition

If tension control is implemented in large-scale sputtering web coaters, then substrate stability is improved, but control accuracy is reduced due to multiple zones with different tensions

Engineering Contradiction:
Improvesubstrate stabilityVSAvoidtension control accuracy
Core Design Contradiction:
Stability of the object's compositionVSMeasurement precision

Solution Approach 1:

The tension control system is divided into multiple independent control sections (unwinding zone, drying zone, deposition zone, winding zone), each with its own tension measurement and control rolls. This segmentation allows precise local tension control in each zone while maintaining overall substrate stability

Inventive Principle:
Principle #1Segmentation

4Manufacturing precision

If multiple tension control rolls are used to achieve accurate tension control, then substrate quality is improved, but device complexity increases

Engineering Contradiction:
Improvesubstrate qualityVSAvoidcontrol system complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

Each tension control section is equipped with a tension measurement roll that automatically detects tension and provides feedback to the control system. The system self-regulates tension in each zone without requiring complex external control mechanisms, simplifying the overall system while maintaining precision

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The two-stage tension control system stabilizes the substrate tension, enhances thermal conductance, and prevents wrinkles and scratches by maintaining appropriate gas pressure and tension conditions, improving the overall manufacturing process efficiency.

Implementation Method 1

a motor driven can roll that cools the long substrate transferred in a roll-to-roll manner and wrapped on an outer peripheral surface of the can roll

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

the outer peripheral surface of the can roll is not flat when viewed microscopically. Thus, between the can roll and the film transferred in tight contact with its outer peripheral surface, gap regions (clearances) are present which separate them with a vacuum space therebetween. Accordingly, it cannot be said that the heat in the film generated during sputtering or vapor deposition is actually efficiently transferred to the can roll from the film

Methodology Applied
Scientific EffectThermal conduction enhancement through gas introduction: Conduction (thermal)

Data Source

PatentEP3495534B1Long substrate treatment apparatus and treatment method
Publication Date: 2020.07.22 SUMITOMO METAL MINING CO LTD
  • EP3495534B1 patent drawingFigure 1
  • EP3495534B1 patent drawingFigure 2
  • EP3495534B1 patent drawingFigure 3

AI summary

An apparatus that performs sputtering or the like on a long film 114 supplied from an unwinding chamber 110 and wrapped on a can roll 131 with a gas discharge mechanism in a deposition chamber 112 is characterized in that the apparatus includes a pair of tension control roll groups (a first tension measurement roll 130 and first motor driven roll 129, and a second tension measurement roll 127 and second motor driven roll 125) on the film infeed side of the can roll, and also a pair of tension control roll groups (a first tension measurement roll 132 and first motor driven roll 133, and a second tension measurement roll 135 and second motor driven roll 137) on the outfeed side of the can roll. Two-stage control of the infeed feed tension and the outfeed feed tension of the can roll is performed using the two pairs of tension control roll groups, respectively. This allows accurate control on the tension of the film and thus makes it possible to avoid formation of scratches or the like.