Substrate Processing Apparatus Weight Measurement Removal Control
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Solution Overview
Problem
Existing substrate processing technologies lack efficient methods for determining and controlling the removal amount of substrates during processing, leading to variations in processing quality and potential defects.
Innovation Solution
A substrate processing apparatus with a weight measuring unit that calculates the weight difference of substrates before and after processing, determining whether the removal amount is within a permissible range, and adjusting processing conditions accordingly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If weight measurement is implemented to control removal amount, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The weight measuring unit is integrated into the relay block that already exists for substrate transfer between processing modules. This merging approach allows weight measurement functionality to be added without creating entirely new measurement systems, thereby improving removal amount control while minimizing the increase in device complexity.
Solution Approach 2:
The relay block is designed to serve multiple functions: substrate transfer and weight measurement. By making the relay block multi-functional, the system achieves precise removal amount control through weight measurement without requiring separate dedicated measurement devices, thus resolving the contradiction between manufacturing precision and device complexity.
2Manufacturing precision
If weight measurement is implemented to control removal amount, then manufacturing precision is improved, but measurement precision requirements increase
Solution Approach 1:
The controller receives weight measurement data from the weight measuring unit and uses this feedback to determine whether the removal amount is within the permissible range. This feedback mechanism allows the system to achieve precise removal amount control by continuously monitoring weight changes and comparing them against predetermined standards, thereby managing the measurement precision requirements through systematic data processing and control.
3Productivity
If multiple processing modules are used to increase productivity, then variations in removal amount increase, but manufacturing precision decreases
Solution Approach 1:
Each processing module is equipped with weight measurement capability, allowing individual monitoring of removal amounts. The controller uses this feedback information to identify and correct variations in removal amount across different modules, thereby maintaining manufacturing precision while enabling high productivity through parallel processing.
Solution Approach 2:
The system monitors weight parameters for each processing module and adjusts processing conditions based on measured variations. By changing processing parameters dynamically according to actual weight measurement data, the system maintains consistent removal amounts across multiple modules, resolving the contradiction between productivity and manufacturing precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures consistent removal amounts and improved processing quality by accurately monitoring and controlling the removal process, reducing defects and variations among processing modules.
Implementation Method 1
a weight measuring unit that measures a weight of the substrate before or after being processed by the processing block
Data Source
AI summary
A substrate processing apparatus includes: a cassette block configured to mount a cassette that accommodates a substrate; a processing block configured to process the substrate; a relay block configured to relay the substrate between the cassette block and the processing block; and a controller. The processing block includes a processing module that performs a removal process of removing a part of the substrate. The relay block includes a weight measuring unit that measures a weight of the substrate before or after being processed by the processing block. The controller includes a removal amount determination unit that calculates a weight difference of the substrate before and after being processed by the processing block using the measurement result of the weight measuring unit and determines whether a removal amount by the removal process is within a permissible range.