Super Abrasive Wheel with Annular Protrusion for Grinding Fluid Diffusion
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Solution Overview
Problem
Conventional grinding wheels face issues with uneven distribution of grinding fluid, leading to unstable rotation and inadequate cooling, which results in poor surface quality and potential burning of the workpiece during semiconductor wafer grinding.
Innovation Solution
A super abrasive wheel design featuring a core with a super abrasive layer and an annular protrusion portion that diffuses grinding fluid uniformly, eliminating the need for a fluid reservoir to ensure stable rotation and efficient fluid distribution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If a fluid reservoir is formed on the inner circumference of the base to store grinding fluid, then grinding fluid supply is improved, but rotation stability deteriorates due to excessive fluid storage
Solution Approach 1:
The invention extracts and eliminates the fluid reservoir component from the grinding wheel structure. Instead of storing grinding fluid in a reservoir on the base, the patent supplies grinding fluid directly through holes in the holding member to the segment grindstone, thereby removing the source of rotation instability while maintaining adequate fluid supply.
Solution Approach 2:
The holding member structure itself serves the dual function of supporting the segment grindstone and distributing grinding fluid through integrated holes. This self-service approach eliminates the need for separate reservoir components, achieving both structural simplicity and effective fluid supply without compromising rotation stability.
2Quantity of substance
If grinding fluid is supplied through supply holes to a part of the contact interface, then fluid supply is achieved, but uniform distribution across the entire contact interface is not realized
Solution Approach 1:
The invention segments the fluid supply system by providing multiple holes distributed across the holding member structure. This segmentation allows grinding fluid to be supplied at multiple locations, ensuring uniform distribution across the entire contact interface between the segment grindstone and the workpiece rather than concentrating fluid at a single location.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves uniform grinding fluid distribution, stabilizes rotation, and maintains a sharp edge for a longer time, resulting in improved surface quality and reduced workpiece burning.
Implementation Method 1
the grinding fluid supplied from the inner circumferential side collides against the annular protrusion portion and diffuses toward the super abrasive layer
Data Source
AI summary
The super abrasive wheel includes a core rotating around a rotation axis and a super abrasive layer bonded to the core. The core has a first surface and a second surface located opposite to the first surface. An annular first protrusion portion protruding in the direction away from the first surface is provided at a portion of the second surface that is surrounded with the super abrasive layer. A reference surface is provided in the second surface on the inside of the first protrusion portion. The height from the reference surface to the first protrusion portion is denoted as A. A top portion having the height B from the reference surface is provided at a portion of the second surface between the first protrusion portion and the super abrasive layer. The height B is greater than the height A.