Surface Treating Apparatus Liquid Dust Capture Mechanism
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Solution Overview
Problem
Existing surface treatment apparatuses face issues with dust contamination, leading to defects during the treatment process, as dust generated from moving parts can fall into the treatment solution, especially when forming fine patterns on substrates, and existing solutions do not effectively prevent fine foreign matters from entering the treatment solution.
Innovation Solution
A surface treating apparatus with protective members below and beside the transferring mechanism, where the mechanism is partially immersed in a liquid, captures dust and prevents its migration to the treatment target, using materials like stainless steel, titanium, or plastic to reduce corrosion and maintain dust capture effectiveness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the roller receiving members are provided outside the bath, then the apparatus structure is simpler, but dust generated from movable parts can fall into the bath and cause defects
Solution Approach 1:
A protective cover is introduced as an intermediary element between the roller receiving members and the treatment bath. This cover prevents dust generated by the rollers from falling into the bath while allowing the rollers to remain positioned outside the bath for structural simplicity. The protective cover acts as a barrier that mediates between the mechanical components and the treatment solution.
2Object-affected harmful factors
If the roller receiving members are provided inside the bath, then dust contamination is prevented, but the apparatus size increases and dust from movable parts may still enter the bath
Solution Approach 1:
The protective cover serves as a localized barrier that provides dust protection without requiring the roller receiving members to be positioned inside the bath. This intermediary structure allows the apparatus to maintain a compact design while effectively preventing dust contamination.
3Device complexity
If treatment solution is discharged onto substrate held at upper part, then plating bath complexity is reduced, but treatment solution consumption increases
Solution Approach 1:
The treatment solution discharge mechanism is extracted from the traditional immersion plating bath configuration. By discharging treatment solution onto the substrate held at the upper part rather than immersing the substrate in a large bath, the system reduces the volume of treatment solution required while simplifying the bath structure.
Solution Approach 2:
Instead of completely immersing the substrate in treatment solution, the system applies treatment solution partially onto the substrate surface. This partial action approach reduces treatment solution consumption while still achieving the required surface treatment effect.
Data Source
AI summary
To provide surface treatment that can reduce occurrence of defects caused by incorporation of dust. Rollers 40 are rotatably fixed to rotating shafts 72 provided to protrude from lateral protective walls 49. The lateral protective walls 49 are fixed perpendicularly to lower protective walls 47 fixed to outer walls 39. Hanging plates 64 of a hanger 50 extend through a space 43 between both lower protective walls 47 and support clips 52. A liquid 41, such as water, is filled in spaces defined by the lateral protective walls 49, the lower protective walls 47, and the outer walls 39. The liquid 41 is filled to cover about half of each rotating shaft 72. Thus, fine dust generated by a transferring mechanism is captured by the liquid 41 and prevented from drifting from the space 34 toward the substrate 54.