Swing Module Cover Protrusion for Polishing Liquid Drainage
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing substrate processing apparatuses face issues with polishing liquid accumulation and solidification on covers, leading to scratches on substrates due to the falling of dried slurry, which existing solutions partially address but not comprehensively prevent.
Innovation Solution
A substrate processing apparatus with a swing module featuring a cover having an elongated shape and protrusions on its upper surface, which directs liquid flow away from the distal end and prevents liquid from falling during arm rotation, combined with an inclined surface for liquid drainage and a water-repellent coating for efficient liquid removal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If the cover has a horizontal surface or recess, then the polishing liquid can be contained, but the polishing liquid accumulates and adheres to the cover, causing solidification and substrate scratches
Solution Approach 1:
The cover surface is designed with an inclined surface rather than a horizontal surface, creating an asymmetric geometry that prevents liquid accumulation. The inclination angle is specifically designed to allow polishing liquid to flow off the cover surface by gravity, preventing adhesion and subsequent solidification that would cause substrate scratches.
Solution Approach 2:
The cover surface incorporates a curved or inclined geometry instead of flat horizontal surfaces. This curved design creates a surface that naturally directs liquid flow toward the edges, preventing pooling and adhesion of polishing liquid, thereby eliminating the source of solidified matter that could scratch substrates.
2Object-affected harmful factors
If the cover is designed to prevent liquid accumulation, then substrate scratches are reduced, but liquid may fall from the cover during swing component rotation
Solution Approach 1:
The cover design incorporates different surface characteristics in different regions: the main surface has an inclined angle to prevent accumulation, while the peripheral edges have specific geometries (such as overhangs or curved edges) that control liquid flow direction during rotation, preventing liquid from falling onto the substrate while maintaining the anti-accumulation property.
3Object-affected harmful factors
If cleaning liquid is sprayed to keep surfaces wet, then polishing liquid drying is prevented, but processing liquid accumulates on swing component covers
Solution Approach 1:
The cover surface geometry is designed to dynamically respond to liquid flow during swing component rotation. The inclined surfaces and edge geometries are configured to utilize centrifugal force and gravity during rotation to actively shed processing liquid, preventing accumulation while maintaining surface wetness to prevent polishing liquid drying.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively suppresses liquid from falling and diluting the polishing liquid, reducing the likelihood of substrate scratches by ensuring liquid remains contained and preventing solidified polishing liquid from contacting the substrate.
Implementation Method 1
the protrusion is provided to be continuous to a distal end which is an end on the side farther from the base portion of the upper surface of the cover in a longitudinal direction and both ends of the upper surface of the cover in a transverse direction
Implementation Method 2
a water-repellent coating for efficient liquid removal
Data Source
AI summary
The substrate processing apparatus according to the disclosure is a substrate processing apparatus for processing a substrate. The substrate processing apparatus includes a swing module, which includes a base portion, an arm which is supported by the base portion and is rotatable about the base portion, and a cover which covers an upper surface of the arm. The cover has an elongated shape in plan view and has a protrusion formed on an outer peripheral portion of an upper surface of the cover to protrude upward. The protrusion is provided to be continuous to a distal end which is an end on the side farther from the base portion of the upper surface of the cover in a longitudinal direction and both ends of the upper surface of the cover in a transverse direction.