Switch Circuit for Semiconductor Probe Pad Decoupling

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Solution Overview

Problem

The existing methods for testing semiconductor wafers using wafer probe cards often result in scratches on bonding pads, leading to reliability issues, and redundant probe pads contribute additional capacitance degrading performance when not needed.

Innovation Solution

A switch circuit is introduced that couples and decouples probe pads from bonding pads during testing and normal operation, reducing capacitance by disconnecting the probe pads from the circuit when not in use.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If probe pads remain connected to the logic circuit after testing, then the circuit remains functional, but additional capacitance is contributed degrading performance

Engineering Contradiction:
Improvecircuit functionalityVSAvoidperformance
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent implements a dynamic switching mechanism that changes the connection state of probe pads based on operational phase. During testing, the switch connects probe pads to the logic circuit for functionality verification. After testing, the switch disconnects the probe pads to eliminate parasitic capacitance effects. This dynamic reconfiguration allows the system to optimize performance by adapting the circuit topology to current operational requirements.

Inventive Principle:
Principle #15Dynamics

2Measurement precision

If probe pins are placed in physical contact with bonding pads for testing, then electrical connection is achieved, but scratches occur deteriorating bonding reliability

Engineering Contradiction:
Improveelectrical connectionVSAvoidbonding reliability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent introduces probe pads as intermediary contact points between the probe pins and the bonding pads. During testing, probe pins contact the probe pads rather than the bonding pads directly. The probe pads serve as sacrificial intermediaries that absorb the mechanical wear and scratching effects, while the bonding pads remain protected for their primary function of wire bonding. This intermediary structure enables testing functionality without compromising bonding reliability.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Adaptability or versatility

If redundant probe pads are provided for unserviceable bonding pads, then all bonding pads become testable, but additional capacitance is added to the circuit

Engineering Contradiction:
ImprovetestabilityVSAvoidcircuit performance
Core Design Contradiction:
Adaptability or versatilityVSProductivity

Solution Approach 1:

The patent implements dynamic switching control that adapts the circuit configuration based on testing requirements. When a bonding pad is unserviceable, the switch connects the corresponding probe pad to the logic circuit, enabling testing of that specific pad. When all bonding pads are serviceable or testing is complete, the switch disconnects the probe pads to eliminate their capacitive effect. This dynamic adaptation provides testability on-demand without permanent performance degradation.

Inventive Principle:
Principle #15Dynamics

Data Source

PatentUS10847433B2Apparatuses and methods for coupling contact pads to a circuit in a semiconductor device
Publication Date: 2020.11.24 MICRON TECHNOLOGY INC
  • US10847433B2 patent drawing
  • US10847433B2 patent drawing
  • US10847433B2 patent drawing

AI summary

Apparatuses and methods for coupling contact pads to a circuit in a semiconductor device is described. An example apparatus includes a first pad, a first wiring coupled to the first pad, a second pad, a second wiring, a circuit coupled to the second pad, and a switch circuit. The switch circuit includes first, second, and third connections, and includes first and second control gates. The first wiring is coupled to the first and third connections and second wiring is coupled to the second connection. The switch circuit is configured to couple the first wiring with the second wiring when the first and second control gates are activated and to decouple the first wiring from the second wiring when the first and second control gates are not activated.