Switchable Reticle Support for Controlled ESD Discharge

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing reticle supports in EUV reticle containers face issues with arcing and damage due to accumulated static charge, whether from insulating or conductive materials, leading to carbon pollution and structural damage.

Innovation Solution

A switchable supporting mechanism with an insulating separator that allows the support to reciprocate relative to the base, establishing or disconnecting an electrostatic discharge conduction path based on external force, using insulating and conductive materials to manage static charge.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the support is made of electrostatic discharge material to discharge static electricity, then static charge can be discharged, but arcing occurs due to overly large voltage difference causing damage and carbon pollution

Engineering Contradiction:

Improvestatic charge discharge capabilityVSAvoidarcing and damage

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The support is designed to be movable relative to the inner pod base, transitioning between a first position (disconnected) and a second position (connected). This dynamic positioning allows the system to control when electrostatic discharge occurs, preventing arcing by ensuring the support is in the disconnected position before reticle placement, then switching to connected position for safe charge dissipation.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The support is pre-positioned in the first position (disconnected from the base) before the reticle is placed into the inner pod. This preliminary disconnection prevents the voltage difference that causes arcing during reticle placement, while still allowing subsequent electrostatic discharge through controlled movement to the second position.

Inventive Principle:

Principle #10Preliminary action

2Object-affected harmful factors

If the support is made of insulating material to prevent conduction, then arcing is prevented, but static electricity cannot be discharged forming extremely large potential difference

Engineering Contradiction:

Improvearcing preventionVSAvoidstatic charge discharge capability

Core Design Contradiction:

Object-affected harmful factorsVSReliability

Solution Approach 1:

The support material properties are combined with dynamic positioning capability. The support can transition between connected and disconnected states, allowing the system to have insulating behavior (preventing arcing) when disconnected and conductive behavior (discharging static) when connected, thus resolving the contradiction between these two opposing requirements.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The electrical conductivity parameter of the support-base interface is changed by moving the support between positions. When disconnected, the interface has insulating properties preventing arcing; when connected, it has conductive properties enabling static charge discharge. This parameter change based on position resolves the contradiction.

Inventive Principle:

Principle #35Parameter changes

3Stability of the object's composition

If the support is fixed to the base to ensure stability, then structural stability is improved, but the support cannot reciprocate to control electrostatic discharge conduction path

Engineering Contradiction:

Improvestructural stabilityVSAvoidelectrostatic discharge control

Core Design Contradiction:

Stability of the object's compositionVSAdaptability or versatility

Solution Approach 1:

The support is designed with controlled mobility, allowing it to reciprocate between a first position (disconnected) and a second position (connected to the base). This dynamic design provides both structural stability when connected and the adaptability to control electrostatic discharge by switching between connected and disconnected states, resolving the contradiction between stability and versatility.

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Prevents arcing and damage by effectively discharging static charge, reducing carbon pollution and maintaining support integrity.

Implementation Method 1

the support comes into contact with the inner pod base to establish an electrostatic discharge conduction path

Methodology Applied

Scientific EffectElectrostatic discharge: Electrostatic Discharge

Implementation Method 2

an insulating separator, for separating a contact between the base and the support

Methodology Applied

Scientific EffectElectrical insulation: Electrical Resistance

Data Source

PatentUS20250284211A1Switchable supporting mechanism and reticle container applying the same

Publication Date: 2025.09.11 GUDENG PRECISION IND CO LTD

AI summary

A switchable supporting mechanism adapted for an inner pod base of a dual pod. A switch of an electrostatic discharge (ESD) conduction path is established between the switchable supporting mechanism and the inner pod base. At an instant that a support of the switchable supporting mechanism is pressed downward by a reticle and comes into contact with the inner pod base, the electrostatic discharge conduction path is closed immediately to discharge electrostatic charge accumulated on a front surface of the reticle. In contrast, when the support is not in contact with the inner pod base, the electrostatic discharge conduction path opens. Therefore, the arcing phenomenon due to a voltage difference between electrostatic charge of the reticle and a conventional supporting mechanism can be prevented, and numerous problems such as carbon pollution (C-burst) and damage caused by electrical breakdown of the support can be solved.