TEM Manipulator Using Linear Actuators for 360-Degree Rotation

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Solution Overview

Problem

Existing manipulators for rotating and translating sample holders in precise applications like Scanning Probe Microscopes and Transmission Electron Microscopes have limited rotational stroke and are prone to slippage, stick/slip effects, and fragility, making them unsuitable for accurate and extensive movement.

Innovation Solution

A manipulator design using linear actuators with driving surfaces that move in opposite directions to achieve rotation and translation, allowing for a rotational stroke exceeding 360 degrees without repositioning, and incorporating tapered cylinders to reduce vibrational sensitivity, and being vacuum-compatible to prevent sample holder slippage and damage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If piezoelectric actuators with multiple degrees of freedom are used to enable both translation and rotation, then the manipulator achieves precise control and no slippage in bearings, but the rotational stroke is very limited (less than +/- 1 degree)

Engineering Contradiction:
Improvecontrol precisionVSAvoidrotational stroke
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

The manipulator is divided into separate functional components: linear actuators for translation and independent rotational mechanism for rotation. This segmentation allows each component to optimize for its specific function, enabling large rotational stroke without compromising translational precision

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention introduces independent rotational degrees of freedom around the translation axis by having driving surfaces move in opposite directions. This adds a rotational dimension that is independent from the translational motion, allowing both large rotation and precise translation simultaneously

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If the manipulator uses driving surfaces that contact the sample holder directly, then precise movement is achieved, but the sample holder may slip or become damaged under certain conditions

Engineering Contradiction:
Improvemovement precisionVSAvoidsample holder stability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The contact pressure and contact area parameters are optimized to maintain reliable contact without excessive force. The linear actuators provide controlled, uniform pressure distribution across the driving surfaces, preventing slippage while avoiding damage to the sample holder

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The manipulator design incorporates compliance elements and controlled contact mechanisms that prevent sudden impacts or excessive forces on the sample holder. The gradual engagement and controlled pressure application protect the sample holder from damage while maintaining precise contact

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

3Measurement precision

If the manipulator is designed for high precision work in vacuum environments, then measurement accuracy is improved, but the mechanism becomes more complex and fragile

Engineering Contradiction:
Improvemeasurement accuracyVSAvoidmechanism complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The invention extracts and eliminates unnecessary complex components from the manipulator design. By using simple linear actuators with directly contacting driving surfaces, the design removes intermediate bearings, gears, and other fragile vacuum-compatible components that would add complexity

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

Instead of using complex mechanisms to achieve rotation (such as rotary actuators or bearing systems), the invention inverts the approach by using linear motion of driving surfaces in opposite directions to create rotational effect. This simplified approach reduces complexity while maintaining precision in vacuum environments

Inventive Principle:
Principle #13The other way round (Inversion)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise and extensive movement of sample holders with reduced vibrational sensitivity and fragility, maintaining sample holder stability and accessibility, suitable for applications requiring high accuracy and vacuum conditions.

Implementation Method 1

the actuators are linear actuators equipped to cause a movement along the translation axis

Methodology Applied
Scientific EffectLinear actuator mechanism:

Implementation Method 2

the driving surfaces are equipped to clasp the driven surface between them

Methodology Applied
Scientific EffectFriction: Friction

Implementation Method 3

incorporating tapered cylinders to reduce vibrational sensitivity

Methodology Applied
Scientific EffectVibrational damping through geometry: Damping

Data Source

PatentEP1947675B1Manipulator for rotating and translating a sample holder
Publication Date: 2009.03.25 FEI CO
  • EP1947675B1 patent drawingFigure 1A~2B
  • EP1947675B1 patent drawingFigure 3A~3B
  • EP1947675B1 patent drawingFigure 4

AI summary

A manipulator for use in e.g. a Transmission Electron Microscope (TEM) is described, said manipulator capable of rotating and translating a sample holder (4). The manipulator clasps the round sample holder between two members (3A, 3B), said members mounted on actuators (2A, 2B). Moving the actuators in the same direction results in a translation of the sample holder, while moving the actuators in opposite directions results in a rotation of the sample holder.