Temperature-Controlled Flange for Gas-Phase Reactors

Solution Overview

Problem

Gas-phase reactors face issues with gas leakage due to flange seal deterioration at elevated temperatures and residue buildup from precursor condensation, which can lead to hazardous particle generation on substrates.

Innovation Solution

The development of temperature-controlled flanges with heated and cooled sections, where the sealing member is cooled to prevent degradation and the inner surface is heated to prevent condensation, using embedded heaters and cooling channels within the flange assembly.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the flange temperature is maintained at elevated processing temperatures, then the reaction efficiency in the reaction chamber is improved, but the resilient seal deteriorates causing gas leakage

Engineering Contradiction:

Improvereaction efficiencyVSAvoidseal integrity

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The flange is divided into two distinct temperature zones: a first section (inner surface facing the reaction chamber) maintained at elevated processing temperature to ensure reaction efficiency, and a second section (outer surface with seal) maintained at lower temperature to protect the resilient seal. This spatial segmentation of temperature control allows both contradictory requirements to be satisfied simultaneously.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different sections of the flange are assigned different thermal properties and temperature conditions. The first section is designed to withstand and utilize high temperatures for optimal chemical reactions, while the second section is designed with thermal protection mechanisms to maintain lower temperatures suitable for resilient seal operation. This local differentiation of thermal quality resolves the contradiction between reaction efficiency and seal integrity.

Inventive Principle:

Principle #3Local quality

2Reliability

If the flange temperature is reduced to protect the resilient seal, then seal deterioration is prevented, but precursors condense on the flange surface creating particles

Engineering Contradiction:

Improveseal integrityVSAvoidparticle generation

Core Design Contradiction:

ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The flange is divided into two distinct temperature zones: a first section (inner surface facing the reaction chamber) maintained at elevated processing temperature to ensure reaction efficiency, and a second section (outer surface with seal) maintained at lower temperature to protect the resilient seal. This spatial segmentation of temperature control allows both contradictory requirements to be satisfied simultaneously.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different sections of the flange are assigned different thermal properties and temperature conditions. The first section is designed to withstand and utilize high temperatures for optimal chemical reactions, while the second section is designed with thermal protection mechanisms to maintain lower temperatures suitable for resilient seal operation. This local differentiation of thermal quality resolves the contradiction between reaction efficiency and seal integrity.

Inventive Principle:

Principle #3Local quality

3Device complexity

If uniform temperature control is applied to the entire flange, then temperature distribution is simplified, but both seal deterioration and precursor condensation cannot be simultaneously prevented

Engineering Contradiction:

Improvetemperature control systemVSAvoidseal integrity

Core Design Contradiction:

Device complexityVSReliability

Solution Approach 1:

The flange is divided into two distinct temperature zones: a first section (inner surface facing the reaction chamber) maintained at elevated processing temperature to ensure reaction efficiency, and a second section (outer surface with seal) maintained at lower temperature to protect the resilient seal. This spatial segmentation of temperature control allows both contradictory requirements to be satisfied simultaneously.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different sections of the flange are assigned different thermal properties and temperature conditions. The first section is designed to withstand and utilize high temperatures for optimal chemical reactions, while the second section is designed with thermal protection mechanisms to maintain lower temperatures suitable for resilient seal operation. This local differentiation of thermal quality resolves the contradiction between reaction efficiency and seal integrity.

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution allows gas-phase reactors to operate at elevated temperatures while mitigating seal deterioration and residue buildup, reducing maintenance time and safety risks, and is particularly effective in epitaxial reactors.

Implementation Method 1

the sealing member is cooled to prevent degradation

Methodology Applied

Scientific EffectCooling: Cooling

Implementation Method 2

the inner surface is heated to prevent condensation

Methodology Applied

Scientific EffectHeating: Heating

Data Source

PatentUS11168395B2Temperature-controlled flange and reactor system including same

Publication Date: 2021.11.09 ASM IP HLDG BV

AI summary

A flange, flange assembly, and reactor system including the flange and flange assembly are disclosed. An exemplary flange assembly includes heated and cooled sections to independently control temperatures of sections of the flange. Methods of using the flange, flange assembly and reactor system are also disclosed.