Nano-imprinting Template Identification via Mother Pattern Segmentation
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Solution Overview
Problem
The existing methods for manufacturing semiconductor device templates using nano-imprinting are time-consuming and costly, and managing and identifying multiple identical templates are challenging.
Innovation Solution
A method involving the creation of a mother template with both device and identification patterns, where the identification patterns are transferred to a substrate to produce child templates with unique identifiers, allowing for efficient and cost-effective production of multiple templates with distinct identification patterns.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If multiple identical templates are produced using conventional electron beam lithography, then manufacturing precision is maintained, but manufacturing time and cost increase significantly
Solution Approach 1:
The patent uses a mother template with identification patterns that can be copied to multiple child templates through nano-imprinting. Instead of creating each template individually via electron beam lithography, the identification patterns are imprinted onto the mother template and then transferred to multiple child templates, significantly reducing manufacturing time while maintaining precision
Solution Approach 2:
The patent divides the template into functional segments: device patterns and identification patterns. The identification patterns are separately designed and positioned on the mother template, allowing them to be replicated independently across multiple child templates. This segmentation enables efficient mass production of identical templates with unique identifiers
2Productivity
If multiple identical templates are produced, then productivity increases, but template management and identification become difficult
Solution Approach 1:
The patent applies local quality by adding unique identification patterns to specific locations on each child template while maintaining the same device patterns. Each child template has identical device patterns but distinct identification patterns in specific areas, enabling easy differentiation and management of multiple templates
Solution Approach 2:
The identification patterns utilize different visual characteristics (analogous to color changes) to distinguish between templates. By varying the identification patterns visually, the patent enables easy identification and tracking of individual templates among multiple identical copies
3Ease of operation
If identification patterns are added to templates, then template identification improves, but device pattern transfer accuracy may be compromised
Solution Approach 1:
The patent segments the template into distinct device pattern areas and identification pattern areas. The mother template contains both types of patterns in separate regions, allowing the nano-imprinting process to transfer both without interference. This spatial segmentation ensures that device pattern accuracy is maintained while identification patterns can be clearly distinguished
Solution Approach 2:
The mother template acts as an intermediary that contains both device patterns and identification patterns. The nano-imprinting process uses the mother template as a mediator to transfer both pattern types to child templates simultaneously, ensuring accurate transfer of device patterns while incorporating unique identification patterns without compromising either
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the efficient and cost-effective production of multiple child templates with unique identifiers, facilitating their management and identification without significantly increasing manufacturing time or costs, while simultaneously transferring device and identification patterns.
Implementation Method 1
Templates used in the imprinting methods are commonly produced by electron beam lithography. Hence, a proposal has been made for producing plural child templates from a mother template by using imprinting technology.
Data Source
AI summary
According to one embodiment, a method for manufacturing a template for imprinting includes preparing a first template having a device pattern and a plurality of identification patterns, and forming a second template by transferring the device pattern and at lest desired one of the identification patterns to a template substrate.