Template Separation in Nanoimprint Lithography Using Localized Substrate Deformation

Solution Overview

Problem

In nano-fabrication processes, particularly in imprint lithography, the separation of a template from a solidified layer on a substrate often results in damage to the recorded pattern due to high separation forces required, which can compromise the structural integrity and alignment of the substrate and template.

Innovation Solution

A method involving the application of a separation force to the template while facilitating localized deformation in the substrate to reduce the magnitude of separation force needed, utilizing a wafer chuck with varying vacuum sections and forces to control substrate strain, and employing air nozzles or trenches to decrease vacuum sealing effects between the template and imprinting layer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Force

If high separation force is applied to separate the template from the solidified layer, then separation is achieved, but damage to the recorded pattern occurs

Engineering Contradiction:

Improveseparation forceVSAvoidintegrity of recorded pattern

Core Design Contradiction:

ForceVSReliability

Solution Approach 1:

The substrate is designed with a strained region that has different mechanical properties (lower strength, higher deformability) compared to the unstrained region. This local quality difference allows the strained region to deform and facilitate template separation with reduced force, while the unstrained region maintains structural integrity to protect the recorded pattern.

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The substrate is functionally segmented into two distinct regions: a strained region that undergoes deformation to aid separation, and an unstrained region that remains structurally intact to preserve the recorded pattern. This segmentation allows different parts of the substrate to serve different functions during the separation process.

Inventive Principle:

Principle #1Segmentation

2Force

If high separation force is applied to separate the template from the solidified layer, then separation is achieved, but alignment of the substrate and template is compromised

Engineering Contradiction:

Improveseparation forceVSAvoidalignment of substrate and template

Core Design Contradiction:

ForceVSManufacturing precision

Solution Approach 1:

The substrate is designed with a strained region that has different mechanical properties (lower strength, higher deformability) compared to the unstrained region. This local quality difference allows the strained region to deform and facilitate template separation with reduced force, while the unstrained region maintains structural integrity to preserve the recorded pattern.

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The substrate is functionally segmented into two distinct regions: a strained region that undergoes deformation to aid separation, and an unstrained region that remains structurally intact to preserve the recorded pattern. This segmentation allows different parts of the substrate to serve different functions during the separation process.

Inventive Principle:

Principle #1Segmentation

3Force

If high separation force is applied to separate the template from the solidified layer, then separation is achieved, but structural integrity of the substrate is compromised

Engineering Contradiction:

Improveseparation forceVSAvoidstructural integrity of substrate

Core Design Contradiction:

ForceVSStrength

Solution Approach 1:

The substrate is designed with a strained region that has different mechanical properties (lower strength, higher deformability) compared to the unstrained region. This local quality difference allows the strained region to deform and facilitate template separation with reduced force, while the unstrained region maintains structural integrity to preserve the recorded pattern.

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The substrate is functionally segmented into two distinct regions: a strained region that undergoes deformation to aid separation, and an unstrained region that remains structurally intact to preserve the recorded pattern. This segmentation allows different parts of the substrate to serve different functions during the separation process.

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Minimizes damage to the recorded pattern by reducing the separation force required, improving alignment and reducing the risk of structural compromise during template separation from the solidified layer, thereby enhancing the precision and integrity of the nano-fabrication process.

Implementation Method 1

utilizing a wafer chuck with varying vacuum sections and forces to control substrate strain

Methodology Applied

Scientific EffectVacuum: Vacuum

Implementation Method 2

employing air nozzles or trenches to decrease vacuum sealing effects between the template and imprinting layer

Methodology Applied

Scientific EffectAir pressure: Pressure Increase

Data Source

PatentUS7635445B2Method of separating a mold from a solidified layer disposed on a substrate

Publication Date: 2009.12.22 CANON KK

AI summary

The present invention is directed towards a method of separating a mold, included in a template, from a layer disposed on a substrate, the method including, inter alia, applying a separation force to the template to separate the template from the layer; and facilitating localized deformation in the substrate to reduce the separation force required to achieve separation.