Test Device Deterioration Detection via Operation History Analysis
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Solution Overview
Problem
Current semiconductor testing methods fail to effectively detect deterioration in specific regions of semiconductor devices during the fabrication process, leading to potential defects and increased manufacturing costs.
Innovation Solution
A test device with a test control unit that detects deterioration in unit circuits based on operation histories, including activation number, time, and current consumption, and compares test output values to expected values to determine deterioration degrees, allowing for the identification and replacement of deteriorated circuits.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional testing methods are used, then manufacturing costs are reduced through basic functionality testing, but deterioration in specific regions cannot be detected
Solution Approach 1:
The test device segments the testing process into distinct functional modules: a test control unit that manages test operations and detects deterioration based on operation histories, an interface unit that routes control signals and data, and a separate analysis component that compares test output values to expected values. This segmentation allows each module to specialize in specific tasks, improving deterioration detection capability while keeping individual module complexities manageable.
Solution Approach 2:
The interface unit acts as an intermediary between the test control unit and the semiconductor device under test. It routes control operation results and test results bidirectionally, enabling complex testing functionality while isolating the complexity within the interface layer rather than propagating it throughout the entire system.
2Measurement precision
If comprehensive testing of all unit circuits is performed, then deterioration detection accuracy is improved, but testing time and productivity decrease
Solution Approach 1:
The test control unit performs preliminary actions by detecting deterioration-expected unit circuits based on operation histories (number of activations, activation time, current consumption) before conducting comprehensive testing. This preliminary identification narrows down the testing scope to only those circuits likely to have deterioration, thereby maintaining high detection accuracy while reducing overall testing time and improving productivity.
Solution Approach 2:
The testing approach applies local quality by focusing comprehensive measurement precision only on deterioration-expected unit circuits identified through operation history analysis, rather than uniformly applying high-precision testing to all unit circuits. This localized approach maintains accuracy where needed while reducing unnecessary testing elsewhere, thus improving productivity.
3Reliability
If operation histories are collected and analyzed for each unit circuit, then deterioration detection capability is improved, but data processing complexity increases
Solution Approach 1:
The test control unit implements multi-functionality by integrating multiple capabilities into a single component: collecting operation histories (number of activations, activation time, current consumption), analyzing this data to detect deterioration-expected unit circuits, and comparing test output values to expected values. This consolidation improves deterioration detection capability while managing data processing complexity through unified control logic rather than separate complex subsystems.
Data Source
AI summary
A test device includes: a test control unit suitable for detecting a deterioration-expected unit circuit among a plurality of unit circuits included in a test-subject device according to operation histories of the plural unit circuits, and detecting a deterioration degree according to a test output value of the deterioration-expected unit circuit; and an interface unit suitable for routing control operation results and test results between the test control unit and the test-subject device during a test operation.