Tunneling Field Effect Transistors for Low-Power Switching

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Solution Overview

Problem

Conventional metal oxide semiconductor field effect transistors (MOSFETs) are limited by thermionic emission, resulting in a subthreshold swing greater than 60 millivolts/decade, which restricts their ability to quickly switch between off and on states, thereby limiting their performance.

Innovation Solution

Tunneling field effect transistors (TFETs) utilize tunneling as the primary current transport mechanism across a potential energy barrier, allowing for a lower subthreshold swing and improved performance by using p-type and n-type source/drain materials with a channel material, enabling higher on-current at lower supply voltages.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional MOSFETs use thermionic emission for current transport, then the device structure is simple and easy to manufacture, but the subthreshold swing is greater than or equal to 60 millivolts/decade, limiting switching performance

Engineering Contradiction:
Improveswitching performanceVSAvoiddevice structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent changes the fundamental current transport mechanism from thermionic emission to band-to-band tunneling by modifying the energy band alignment between source and channel materials. This parameter change enables subthreshold swing below 60 mV/decade, improving switching performance while maintaining device functionality

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs composite material structures including heterojunctions of different semiconductor materials (e.g., InGaAs channel with InAlAs source/drain) to create favorable band alignment for tunneling. These composite structures enable the tunneling mechanism while providing a systematic approach to device fabrication

Inventive Principle:
Principle #40Composite materials

2Power

If MOSFETs operate at higher supply voltages to achieve higher on-current, then the current drive capability improves, but the power consumption increases

Engineering Contradiction:
Improvepower consumptionVSAvoidon-current
Core Design Contradiction:
PowerVSProductivity

Solution Approach 1:

The patent changes the current transport mechanism to band-to-band tunneling, which provides higher on-current at lower supply voltages compared to thermionic emission. This parameter change directly addresses the trade-off between power consumption and current drive capability, enabling low-power operation

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent substitutes the thermionic emission mechanism with quantum mechanical tunneling for current transport. This substitution allows carriers to traverse the barrier through quantum tunneling rather than thermal excitation, achieving higher efficiency and lower power consumption

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

TFETs achieve a lower subthreshold swing compared to conventional MOSFETs, enabling higher on-current at lower supply voltages, making them suitable for low-power devices such as smartphones and medical devices.

Implementation Method 1

TFETs utilize tunneling as the primary current transport mechanism across a potential energy barrier

Methodology Applied
Scientific EffectTunneling:

Implementation Method 2

a gate above the channel material, on the first side face and on the second side face

Methodology Applied
Scientific EffectField effect: Electric Field

Data Source

PatentUS11404562B2Tunneling field effect transistors
Publication Date: 2022.08.02 INTEL CORP
  • US11404562B2 patent drawing
  • US11404562B2 patent drawing
  • US11404562B2 patent drawing

AI summary

Disclosed herein are tunneling field effect transistors (TFETs), and related methods and computing devices. In some embodiments, a TFET may include: a first source/drain material having a p-type conductivity; a second source/drain material having an n-type conductivity; a channel material at least partially between the first source/drain material and the second source/drain material, wherein the channel material has a first side face and a second side face opposite the first side face; and a gate above the channel material, on the first side face, and on the second side face.