TFT Array Substrate Ion Doping for Contact Resistance

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Solution Overview

Problem

Existing organic light-emitting display apparatuses face challenges in achieving high performance and integration due to parasitic capacitance and signal interference in thin-film transistor (TFT) arrays, which affect the display's voltage handling and stability.

Innovation Solution

A TFT array substrate with a switching TFT structure that includes source and drain contact portions doped with different ions than the respective regions, forming a p-n junction to increase barrier height and reduce contact resistance, combined with a storage capacitor design that overlaps with the driving TFT to enhance storage capacity and reduce parasitic capacitance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If the source and drain regions are doped with the same ions, then the manufacturing process is simple, but the contact resistance is high and IR drop occurs

Engineering Contradiction:
Improvedoping process simplicityVSAvoidcontact resistance
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent applies different ion doping to different regions: the source region is doped with first ions while the drain region is doped with second ions. This local differentiation creates optimal contact properties at each electrode interface, reducing contact resistance and IR drop while maintaining manufacturing feasibility through a standardized dual-doping process.

Inventive Principle:
Principle #3Local quality

2Reliability

If the storage capacitor is separated from the driving TFT, then the parasitic capacitance is low, but the storage capacity is insufficient

Engineering Contradiction:
Improveparasitic capacitanceVSAvoidstorage capacity
Core Design Contradiction:
ReliabilityVSQuantity of substance

Solution Approach 1:

The storage capacitor is nested within the driving TFT structure by using the same pixel electrode as one capacitor electrode and forming the other capacitor electrode within the TFT architecture. This nested configuration maximizes storage capacity within the available space while minimizing parasitic capacitance through shared structural elements and optimized electrode positioning.

Inventive Principle:
Principle #7Nested doll (Nesting)

3Illumination intensity

If high voltage is applied to improve display performance, then the brightness and contrast are enhanced, but degradation occurs due to high voltage stress

Engineering Contradiction:
Improvedisplay brightnessVSAvoiddevice degradation
Core Design Contradiction:
Illumination intensityVSReliability

Solution Approach 1:

The patent changes the electrical parameters at the source and drain contacts by doping with different ion types, creating optimized contact resistance and barrier height characteristics. This parameter optimization allows the device to handle high voltages more effectively, reducing degradation while maintaining the brightness and contrast performance required for display quality.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution improves the TFT array substrate's performance by increasing contact resistance, reducing IR drop, and mitigating degradation from high voltages, thereby enhancing the display's reliability and efficiency.

Implementation Method 1

the source contact portion is doped with ions that are different from ions of the switching source region and the drain contact portion is doped with ions that are different from ions of the switching drain region. In the source contact portion and the switching source region, a barrier height may be increased due to a p-n junction.

Methodology Applied
Scientific Effectp-n junction: Diode

Implementation Method 2

generate light as excitons that are generated when holes injected from the hole injection electrode and electrons injected from the electron injection electrode combine with each other in the organic emission layer and change from an excited state to a ground state

Methodology Applied
Scientific EffectElectroluminescence: Electroluminescence

Data Source

PatentUS10522605B2Thin-film transistor array substrate and organic light-emitting display apparatus including the same
Publication Date: 2019.12.31 SAMSUNG DISPLAY CO LTD
  • US10522605B2 patent drawing
  • US10522605B2 patent drawing
  • US10522605B2 patent drawing

AI summary

A thin-film transistor (TFT) array substrate includes: a driving TFT provided on a substrate; and a switching TFT provided on the substrate and including: a switching semiconductor layer including a switching channel region, a switching source region, and a switching drain region; and a switching source electrode and a switching drain electrode contacting the switching semiconductor layer. The switching source electrode includes a source contact portion contacting the switching source region, and the switching drain electrode includes a drain contact portion contacting the switching drain region. The source contact portion is doped with ions that are different from ions of the switching source region and the drain contact portion is doped with ions that are different from ions of the switching drain region.