Scanning Probe Microscope Thermal Cantilever Separation

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Solution Overview

Problem

Existing scanning probe microscopes using intermittent measurement methods face challenges in reducing measurement time due to the lag in response of piezoelectric elements, which limits the approach speed and results in increased wear and damage to probes and samples.

Innovation Solution

The implementation of a scanning probe microscope that uses thermal deformation of the cantilever to separate from the sample surface, allowing for faster separation operations and reducing measurement time by leveraging thermal expansion mechanisms.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If piezoelectric elements are used to separate the probe from the sample surface, then the separation operation can be performed, but the lag in response increases the measurement time

Engineering Contradiction:
Improveseparation operation reliabilityVSAvoidmeasurement time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The patent replaces the piezoelectric element-based mechanical separation system with a thermal field-based separation system. By applying heat to the cantilever, the material undergoes thermal expansion, which passively separates the probe from the sample surface without requiring fast mechanical actuation, thereby eliminating the response lag inherent in piezoelectric actuators.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent utilizes thermal expansion of the cantilever material as the separation mechanism. When the cantilever is heated, it expands thermally, causing the probe to move away from the sample surface. This passive thermal-driven separation avoids the need for high-speed mechanical actuators and their associated response delays.

Inventive Principle:
Principle #37Thermal expansion

2Productivity

If the approach speed is increased to reduce measurement time, then productivity improves, but the force applied to the sample increases causing damage

Engineering Contradiction:
Improvemeasurement speedVSAvoidforce applied to sample
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

The patent replaces the active mechanical control of approach speed with a passive thermal field-based approach. The cantilever is heated to induce thermal expansion, which naturally limits the approach speed based on the thermal diffusion rate rather than mechanical actuation speed. This eliminates the need to balance speed against force application, as the thermal process inherently progresses at a controlled rate.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the control parameter from mechanical velocity to temperature. By controlling the heating rate and temperature distribution in the cantilever, the approach speed is indirectly controlled through thermal diffusion characteristics, which naturally prevent excessive forces while maintaining high productivity.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables significantly faster measurement times, minimizing probe and sample wear, and allowing for higher approach speeds without increasing the force applied, thus enhancing the efficiency of scanning probe microscopy.

Implementation Method 1

the control device executes the second operation by thermally deforming the cantilever

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentUS10837982B2Scanning probe microscope and scanning method using the same
Publication Date: 2020.11.17 HITACHI HIGH TECH ANALYSIS CORP
  • US10837982B2 patent drawing
  • US10837982B2 patent drawing
  • US10837982B2 patent drawing

AI summary

To avoid applying overload on both a probe and a sample surface, and to reduce time for measuring irregular shapes on the sample surface in performing an intermittent measurement method, provided is a scanning probe microscope including: a cantilever having a probe attached thereto, the scanning probe microscope being configured to scan a sample surface by intermittently bringing the probe into contact with the sample surface; and a control device configured to perform a first operation of bringing the probe and the sample surface into contact with each other, and a second operation of separating the probe and the sample surface from each other after the first operation. The control device executes the second operation by thermally deforming the cantilever.