Thermally Conductive Sheet Non-Adhesive Layer Focus Ring
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Solution Overview
Problem
The existing substrate mounting devices face challenges in preventing the thermally conductive sheet from adhering to the focus ring or mounting table, which hampers heat transfer and complicates the exchange process, leading to inefficient operation and poor etching characteristics in the peripheral regions of the substrate during plasma processing.
Innovation Solution
A thermally conductive sheet with a non-adhesive layer on at least one surface is used between the focus ring and the mounting table, combined with a pressing unit to ensure effective heat transfer and prevent adhesion, utilizing materials like metal thin films or polymer films to maintain high thermal conductivity while preventing adherence.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a thermally conductive sheet is used between the focus ring and mounting table to improve heat transfer, then thermal conductivity is improved, but the sheet adheres to the focus ring or mounting table causing operational difficulties
Solution Approach 1:
The patent divides the contact interface between the focus ring and mounting table into two functional layers: a thermally conductive layer for heat transfer and a non-adhesive release layer for easy separation. This segmentation allows the thermally conductive sheet to be exchanged without adhesion problems by peeling off the release layer.
Solution Approach 2:
The patent introduces a non-adhesive release layer as an intermediary between the thermally conductive material and the focus ring/mounting table surfaces. This intermediary layer prevents direct adhesion while allowing thermal energy to pass through, resolving the contradiction between heat transfer efficiency and ease of operation.
2Object-generated harmful factors
If the focus ring is made conductive to prevent plasma deposition on substrate edges, then deposition is prevented, but the focus ring temperature increases due to poor thermal conductivity with the mounting table
Solution Approach 1:
The thermally conductive sheet acts as a mediator between the focus ring and mounting table, providing a thermal pathway to conduct heat away from the focus ring. This prevents excessive temperature buildup while maintaining the conductive properties needed to control plasma deposition.
Solution Approach 2:
The patent uses composite material structure for the focus ring assembly, combining conductive materials (for plasma control) with thermally conductive sheet materials (for heat dissipation). This composite approach allows simultaneous achievement of plasma deposition prevention and temperature control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively prevents the thermally conductive sheet from adhering to the focus ring or mounting table, ensuring efficient heat transfer and improving the exchange process, while maintaining high thermal conductivity and preventing the deterioration of etching characteristics in the peripheral regions of the substrate.
Implementation Method 1
a thermally conductive sheet having a non-adhesive layer on at least one surface of the sheet and provided between the mounting table and the focus ring
Implementation Method 2
the thermally conductive sheet has a non-adhesive layer on each of one or more surfaces of the sheet
Data Source
AI summary
A thermally conductive sheet is used between a mounting table for mounting thereon a target substrate and an annular focus ring mounted on the mounting table to surround a circumferential peripheral portion of the target substrate. Further, the mounting table includes therein a cooling unit and is disposed in a depressurized accommodating chamber for accommodating therein the target substrate. The thermally conductive sheet has a non-adhesive layer on each of one or more surfaces thereof.