Thermoelectric Block Segmentation for Semiconductor Chiller Temperature Control
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Solution Overview
Problem
Existing thermoelectric systems for semiconductor manufacturing equipment face limitations in controlling a wide temperature range, particularly high temperatures, leading to instability and reduced lifespan due to frequent polarity changes and hysteresis, which affects precision and energy efficiency.
Innovation Solution
A wide range temperature control system that modifies the refrigerant circulation configuration to pass through multiple thermoelectric element block groups, uses a heat exchanger and heater in the refrigerant tank, and adjusts the bypass of thermoelectric element block groups via a variable valve to maintain precise control and prevent thermoelectric element deterioration, employing PID control to minimize dead zones and optimize energy usage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If a single thermoelectric element is used for both cooling and heating by reversing polarity, then the device size is reduced and electronic control is improved, but the thermoelectric element deteriorates rapidly and control precision decreases due to frequent polarity changes
Solution Approach 1:
The patent divides the single thermoelectric element into multiple independent elements arranged in series. Each element maintains a fixed polarity and operates in a single direction (heating or cooling), eliminating the need for polarity reversal. This segmentation extends element lifespan while achieving bidirectional temperature control through the series arrangement.
Solution Approach 2:
The series arrangement of multiple thermoelectric elements provides universal functionality, where the same physical structure can achieve both heating and cooling modes by controlling the current direction through the series circuit, without requiring each individual element to reverse polarity.
2Device complexity
If a single thermoelectric element reverses polarity for heating and cooling, then device complexity is reduced, but control precision deteriorates due to hysteresis region and dead zone
Solution Approach 1:
By segmenting the thermoelectric component into multiple fixed-polarity elements, the patent eliminates the hysteresis and dead zone problems associated with polarity reversal in single elements. Each segment operates continuously in one direction, enabling precise incremental control without the nonlinear transitions that plague polarity-reversing systems.
3Temperature
If thermoelectric elements operate at high temperatures, then wide temperature range control is achieved, but the thermoelectric elements deteriorate rapidly
Solution Approach 1:
The patent employs multiple thermoelectric elements in series, where each element operates within its optimal temperature range. The series arrangement allows the system to achieve high temperature control capability while individual elements remain within their reliable operating parameters, preventing rapid deterioration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables stable and precise temperature control across a broad range, including high temperatures, while reducing energy consumption and extending the lifespan of thermoelectric elements by using thermoelectric elements efficiently and minimizing dead zones.
Implementation Method 1
a basic device of semiconductor manufacturing equipment is a chiller for controlling a temperature of semiconductor manufacturing equipment... a method using a thermoelectric element that has less noise and a small size and that can be precisely controlled electronically is being used... the thermoelectric element can be efficiently cooled with a relatively simple configuration... the thermoelectric element includes a heat absorption surface and a heat dissipation surface and moves heat from the heat absorption face to the heat dissipation surface so that cooling can be performed
Implementation Method 2
a heat exchanger using process cooling water (PCW) is configured in the refrigerant tank
Implementation Method 3
a heater for high temperature heating is further configured
Data Source
AI summary
A wide range temperature control system for semiconductor manufacturing equipment uses a thermoelectric element applied to a chiller that is a temperature control device for semiconductor manufacturing equipment. The refrigerant circulated through a refrigerant tank passes through thermoelectric element block groups and is cooling and heating controlled, outputs of the thermoelectric element block groups are then supplied to a load, a heat exchanger using process cooling water (PCW) is configured in the refrigerant tank in which the refrigerant recirculated from a working load is stored, a heater for high temperature heating is further configured, some of the thermoelectric element block groups at a high temperature are bypassed through a variable valve, the polarity of a voltage is reversed in the thermoelectric element block groups through which a high-temperature refrigerant passes, and a part of an insulating element adjacent to the refrigerant is maintained at a lower temperature than the refrigerant.