Thin-Film Sensor Element for Combined Pressure and Temperature Measurement
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Solution Overview
Problem
The production of combined fluid pressure and temperature measuring devices is complex and expensive due to the need for separate and intricate components.
Innovation Solution
Integration of pressure and temperature transducers using thin-film technology, where resistance elements for both measurements are manufactured on a single sensor element, allowing for cost-effective production and independent measurement signals.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If separate pressure and temperature transducers are used, then measurement functionality is achieved, but production complexity and cost increase
Solution Approach 1:
The patent combines pressure and temperature transducers into a single integrated device where both transducers share common components including the housing, sensor element, membrane, and electrical connections. This merging eliminates the need for separate transducer assemblies and reduces overall device complexity while maintaining both measurement functionalities.
Solution Approach 2:
The integrated transducer design allows a single device to perform multiple functions - measuring both pressure and temperature simultaneously. The common housing, sensor element, and electrical infrastructure serve both transducers, enabling one device to replace what would traditionally require two separate devices.
2Adaptability or versatility
If separate pressure and temperature transducers are used, then measurement functionality is achieved, but production cost increases
Solution Approach 1:
By merging the pressure and temperature transducers into a single integrated unit with shared housing, sensor element, and electrical connections, the patent reduces the total number of components that need to be manufactured and assembled. This consolidation directly lowers production costs while maintaining both measurement capabilities.
Solution Approach 2:
The universal design allows a single device structure to serve dual purposes for pressure and temperature measurement, eliminating the need to produce and assemble two separate transducer units. This multi-functionality approach reduces material costs, manufacturing expenses, and assembly operations.
3Ease of manufacture
If resistance elements are integrated on a single sensor element, then production cost decreases, but measurement interference may increase
Solution Approach 1:
The patent applies different resistance elements with specific local qualities - pressure-sensitive resistors are positioned on the membrane where they experience mechanical deformation, while temperature-sensitive resistors are positioned on the housing where they experience thermal changes. This localized placement ensures each resistor type responds to its intended parameter without significant interference from the other.
Solution Approach 2:
The sensor element is segmented into functionally distinct regions - a membrane portion for pressure sensing and a housing portion for temperature sensing. The resistance elements are placed in these separate regions, allowing independent response to pressure and temperature changes respectively, thereby minimizing measurement interference while maintaining integrated production.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the production of a cost-effective measuring device that can accurately measure fluid pressure and temperature with simplified signal evaluation, as the resistance elements are designed to be either temperature-independent or pressure-independent, reducing interference and complexity.
Implementation Method 1
a first resistance element (R1-R4) of a first resistance measuring bridge (21) which is applied to the membrane (17) in such a way that the resistance elements (R1-R4) change their electrical resistance in response to a change in pressure
Implementation Method 2
a second resistance element (R15, R16) of a second resistance measuring bridge (23) which is applied to the housing (13) in such a way that the resistance elements (R15, R16) change their electrical resistance in response to a change in temperature
Data Source
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AI summary
The invention relates to a measuring device for measuring a fluid pressure and for measuring a fluid temperature, wherein a common sensor element comprising a fluid chamber and a membrane is provided for both measurements, on which, on the side of the membrane facing away from the fluid chamber, both a resistance measuring bridge associated with pressure measurement with at least one pressure-dependent resistance element for generating a bridge voltage proportional to the fluid pressure and a resistance measuring bridge associated with temperature measurement with at least one temperature-dependent resistance element for generating a bridge voltage proportional to the fluid temperature are applied, each in thin-film technology.