Thin-Film Device Transfer Method for High Aperture Ratio Displays

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Solution Overview

Problem

Conventional thin-film devices for displays formed on rigid substrates face challenges in achieving high aperture ratio and storage capacitance due to the need for pixel electrodes to extend to the peel-off surface, leading to reduced contrast and definition, especially in electrophoretic and liquid crystal displays.

Innovation Solution

A method for manufacturing thin-film devices involves forming a separation layer, a base insulating layer, and a thin-film device layer on a substrate, bonding it to a transfer body with an adhesive, and causing delamination to transfer the device in one step, allowing for the formation of thin-film transistors and capacitors without the need for additional wiring layers, thus maintaining high aperture ratio and storage capacitance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If pixel electrodes extend to the peel-off surface in one-step transfer, then the manufacturing process is simplified, but circuit components cannot be arranged in the pixel electrode region leading to reduced storage capacitance

Engineering Contradiction:
Improvemanufacturing process simplicityVSAvoidstorage capacitance
Core Design Contradiction:
Ease of manufactureVSQuantity of substance

Solution Approach 1:

The patent introduces a Z-directional stacking structure where pixel electrodes and circuit components (transistors, storage capacitors) are arranged in different vertical layers. The pixel electrodes are positioned in the first wiring layer while circuit components are formed in subsequent layers, enabling three-dimensional spatial arrangement that resolves the conflict between electrode positioning and circuit integration.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements a nested structure where the pixel electrode region contains multiple functional layers: the pixel electrode itself in the first wiring layer, followed by interlayer insulating layers, then circuit components (transistors and storage capacitors) in upper layers. This nested arrangement allows circuit components to be positioned within the vertical space above the pixel electrodes, maximizing space utilization while maintaining electrical functionality.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Quantity of substance

If pixel electrodes are made small to increase storage capacitance, then storage capacitance improves, but aperture ratio decreases leading to reduced display contrast

Engineering Contradiction:
Improvestorage capacitanceVSAvoidaperture ratio
Core Design Contradiction:
Quantity of substanceVSArea of stationary object

Solution Approach 1:

The patent transitions from two-dimensional planar arrangement to three-dimensional vertical stacking, allowing pixel electrodes to maintain large horizontal area (high aperture ratio) while storage capacitors are positioned in the vertical direction above the pixel electrodes. This spatial separation in the Z-direction enables both large electrode area and sufficient storage capacitance to coexist.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Quantity of substance

If two-step transfer process is used to form separate wiring layers, then circuit components can be arranged below pixel electrodes, but manufacturing complexity and cost increase

Engineering Contradiction:
Improvestorage capacitanceVSAvoidmanufacturing process complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The patent combines the formation of pixel electrodes and circuit components into a single integrated transfer process. The thin-film device layer containing both pixel electrodes and circuit components is formed on a single substrate and transferred together in one step, eliminating the need for separate transfer steps while maintaining the ability to arrange circuit components in the pixel electrode region through vertical layering.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent performs preliminary formation of the complete thin-film device layer structure (including pixel electrodes, interlayer insulating layers, and circuit components) on the substrate before transfer. This preliminary arrangement allows circuit components to be positioned in the pixel electrode region from the outset, and the entire structure is then transferred as a unit, simplifying the manufacturing process while achieving the desired spatial arrangement.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the production of flexible displays with high definition, resolution, and performance at a low cost, while reducing leakage currents and maintaining sufficient storage capacitance without the complexity and cost of two-step transfer processes.

Implementation Method 1

causing intralayer delamination or interfacial delamination in the separation layer

Methodology Applied
Scientific EffectDelamination:

Implementation Method 2

bonding a transfer layer including the base insulating layer and the thin-film device layer to a transfer body with an adhesive

Methodology Applied
Scientific EffectAdhesion: Adhesive

Data Source

PatentUS7968388B2Thin-film device, method for manufacturing thin-film device, and display
Publication Date: 2011.06.28 138 EAST LCD ADVANCEMENTS LTD
  • US7968388B2 patent drawing
  • US7968388B2 patent drawing
  • US7968388B2 patent drawing

AI summary

A method for manufacturing a thin-film device includes forming a separation layer on a substrate, forming a base insulating layer on the separation layer, forming a thin-film device layer on the base insulating layer, bonding a transfer layer including the base insulating layer and the thin-film device layer to a transfer body with an adhesive, causing intralayer delamination or interfacial delamination in the separation layer, and removing the transfer layer from the substrate. The thin-film device layer includes a first wiring sublayer which is located at the bottom of the thin-film device layer and which is in contact with the base insulating layer, a dielectric sublayer which is in contact with a surface of the first wiring sublayer, a semiconductor sublayer electrically insulated from the first wiring sublayer with the dielectric sublayer, and a second wiring sublayer formed subsequently to the semiconductor sublayer. The first wiring sublayer includes electrodes located at the bottom of the thin-film device layer.