Three-Axis Gyroscope Structure for Orthogonal Mode Decoupling
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Solution Overview
Problem
Traditional three-axis gyroscopes suffer from mutual coupling errors in their X, Y, and Z axes, leading to large coupling errors and the inability to achieve electrical orthogonal suppression and capacitance modality matching simultaneously.
Innovation Solution
A three-axis gyroscope design with independent first, second, and third sensitive structures, each connected by elastic members, allowing for orthogonal detection modalities without interference, and incorporating drive structures with drive electrodes to facilitate differential motion and capacitance changes for accurate angular velocity measurement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional three-axis gyroscope structure is used, then device complexity is reduced, but measurement precision deteriorates due to mutual coupling errors in X, Y, and Z axes
Solution Approach 1:
The gyroscope is divided into three independent sensitive structures (first, second, and third sensitive structures), each responsible for detecting angular velocity in a specific direction. Each sensitive structure includes its own mass blocks, elastic members, and drive portions, allowing independent operation and eliminating mutual coupling errors between axes while maintaining overall system functionality.
2Measurement precision
If electrical control of detection modality is applied to suppress coupling errors, then measurement precision improves, but device complexity increases due to additional control mechanisms
Solution Approach 1:
The sensitive structures utilize their own inherent elastic members and mass blocks to generate and detect vibrations without requiring external electrical control mechanisms. The drive portions directly drive the mass blocks to vibrate in specific directions, and the detection is performed by measuring these vibrations, eliminating the need for complex electrical suppression systems.
3Measurement precision
If capacitance modality matching is implemented, then measurement precision improves, but ease of manufacture deteriorates due to stricter manufacturing tolerances
Solution Approach 1:
The elastic members are designed with specific local properties (flexibility, strength, and dimensional characteristics) that are optimized for their individual functions. By carefully designing the local geometry and material properties of each elastic member, the system achieves capacitance modality matching without requiring extremely tight overall manufacturing tolerances, as each component's local characteristics can be independently optimized.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design achieves high detection sensitivity and accuracy by eliminating coupling errors, enabling electrical orthogonal suppression and capacitance modality matching, thereby improving the overall performance and stability of the gyroscope.
Implementation Method 1
first elastic members for connecting the first sensitive structure and the drive structure; the three-axis gyroscope comprises fourth elastic members, the first drive portions and the third drive portions are respectively connected to two end portions of the drive arms along the first direction through the fourth elastic members
Implementation Method 2
the drive structure comprises first drive portions, drive arms, and third drive portions, and second drive portions are formed on the drive arms; the drive structure further comprises drive electrodes which are mounted on the first drive portions and the third drive portions
Implementation Method 3
the first drive portions are connected with the first sensitive structure through the first elastic members; the first mass block and the second mass block can move towards or away from each other in the second direction
Implementation Method 4
A micro-electromechanical system (MEMS) gyroscope in the prior art can detect an angular velocity according to the generation principle of Coriolis force
Data Source
AI summary
The present invention provides a three-axis gyroscope and electronic products, including a drive structure used for driving the three-axis gyroscope, a first sensitive structure used for sensing an angular velocity in a first direction, a second sensitive structure used for sensing an angular velocity in the second direction, a third sensitive structure used for sensing an angular velocity in a third direction. The first sensitive structure, the second sensitive structure and the third sensitive structure can be mutually coupled in the first detection modality, the second detection modality and the third detection modality, which can effectively avoid the coupling error, achieve electrical orthogonal suppression and capacitance modality matching in the first detection modality, the second detection modality or the third detection modality, so that the structural performance loss can be compensated, thus reducing an orthogonal error and improving the detection accuracy and overall performance of the three-axis gyroscope.