Throttle Valve Housing Cooling for Stable Pressure Control
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Solution Overview
Problem
In substrate fabrication, the frequent on-off switching of throttle valves generates excessive heat, leading to unwanted electrical noise and controller failures, resulting in reduced throughput and costly replacements due to the impracticality of replacing individual PCBs within processing chambers.
Innovation Solution
An electronic heat-controlled throttle valve system with a sensing device and fan configuration that remains off below a predetermined temperature and automatically turns on when the temperature exceeds this threshold, actively cooling the housing to mitigate heat-related issues.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the throttle valve is frequently switched on and off to control pressure, then pressure control is achieved, but excessive heat is generated by the throttle valve motor
Solution Approach 1:
A temperature sensing device is introduced as an intermediary between the throttle valve motor and the control system. The sensor monitors temperature and triggers a cooling fan when temperature exceeds a threshold, creating an automated feedback loop that prevents overheating without requiring manual intervention or system shutdown
Solution Approach 2:
The temperature sensing device provides continuous feedback about the thermal state of the throttle valve motor to the control system. This feedback enables the system to automatically activate cooling when needed and deactivate it when temperature is acceptable, creating a self-regulating thermal management system that maintains reliable operation
2Reliability
If the throttle valve motor generates excessive heat, then pressure control function is maintained, but electrical noise increases and controller failure occurs
Solution Approach 1:
The cooling fan is activated before the throttle valve motor reaches critical temperatures that would generate excessive electrical noise. By preemptively cooling the motor, the system prevents the generation of harmful electrical noise and potential controller failures before they occur
Solution Approach 2:
The temperature sensing device, which detects the harmful thermal condition, is used to trigger a beneficial cooling action. The harmful heat that would otherwise cause electrical noise and controller failure is converted into a useful signal that activates the cooling fan, transforming a potential failure mode into a self-correcting mechanism
3Reliability
If the PCB is replaced after failure, then controller function is restored, but replacement is impractical and costly
Solution Approach 1:
The temperature sensing and cooling fan system provides protective cushioning against thermal stress before it can cause controller failure. By maintaining the throttle valve motor within safe temperature ranges, the system prevents damage to the PCB and other controller components, eliminating the need for costly and impractical replacements
Solution Approach 2:
The thermal management system is fully automated and self-service. The temperature sensor continuously monitors conditions and automatically activates the cooling fan when needed, without requiring external intervention or maintenance. This self-regulating system prevents controller failures before they occur, making replacement unnecessary
4Reliability
If the throttle valve is replaced after PCB failure, then system operation is restored, but throughput is reduced due to chamber downtime
Solution Approach 1:
The temperature sensing and cooling system performs preliminary protective action by preventing thermal damage to the controller before it occurs. By maintaining safe operating temperatures, the system avoids controller failures and the subsequent throttle valve replacements that would cause processing chamber downtime and reduce throughput
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution decreases unwanted electrical noise and extends the operational life of pressure systems, thereby enhancing substrate fabrication outcomes and increasing overall processing chamber throughput by reducing downtime.
Implementation Method 1
a sensing device disposed in an interior of the housing... the sensing device is responsive to temperature changes in the interior of the housing
Implementation Method 2
a fan open to the interior of the housing... automatically turns on when the temperature within interior of the housing is equal to or greater than the predetermined temperature
Data Source
AI summary
Methods and apparatus for processing a substrate are provided herein. For example, a processing volume for processing a substrate and a pressure system in fluid communication with the processing volume and comprising a throttle valve assembly including a housing, a sensing device disposed in an interior of the housing, and a fan open to the interior of the housing, wherein, during operation of the pressure system to control a pressure within the processing volume, the sensing device is responsive to temperature changes in the interior of the housing such that the fan remains off when a temperature of the interior of the housing is less than a predetermined temperature and automatically turns on when the temperature within interior of the housing is equal to or greater than the predetermined temperature.