3D Thyristor Memory Structure for Low-Leakage Scalable DRAM

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Solution Overview

Problem

Conventional DRAMs face challenges such as increased leakage current, complex processes, and higher costs due to their size limitations, necessitating a more efficient memory structure with improved scalability and operation speed.

Innovation Solution

A three-dimensional memory structure utilizing a thyristor operating mechanism with a 3T architecture, comprising a substrate, gate structures, and channel bodies, allowing for high scalability and fast operation speed by adjusting gate bias voltages to control hysteresis windows without complex doping structures.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If 1T1C DRAM structure is used, then memory size can be reduced, but leakage current increases and process complexity increases

Engineering Contradiction:
Improvememory cell sizeVSAvoidleakage current
Core Design Contradiction:
Volume of moving objectVSObject-generated harmful factors

Solution Approach 1:

The patent changes the operational parameters by using a thyristor-based 3T structure instead of 1T1C, utilizing the hysteresis window characteristics of thyristors to achieve stable data storage with reduced leakage current through parameter optimization of the transistor configuration

Inventive Principle:
Principle #35Parameter changes

2Volume of moving object

If 1T1C DRAM structure is used, then memory size can be reduced, but process complexity increases

Engineering Contradiction:
Improvememory cell sizeVSAvoidprocess complexity
Core Design Contradiction:
Volume of moving objectVSDevice complexity

Solution Approach 1:

The patent optimizes the transistor configuration parameter by adopting a 3T thyristor structure with gate-all-around design, which simplifies the manufacturing process compared to 1T1C while achieving smaller effective memory cell footprint through improved spatial arrangement

Inventive Principle:
Principle #35Parameter changes

3Ease of manufacture

If conventional DRAM structure is used, then manufacturing is simpler, but sensing margin is smaller

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidsensing margin
Core Design Contradiction:
Ease of manufactureVSMeasurement precision

Solution Approach 1:

The patent enhances the sensing margin by utilizing the thyristor hysteresis window characteristic, which provides a larger current difference between logic 0 and logic 1 states, improving measurement precision while maintaining manufacturing feasibility through standard CMOS-compatible processes

Inventive Principle:
Principle #35Parameter changes

4Ease of manufacture

If conventional DRAM structure is used, then manufacturing is simpler, but retention time is shorter

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidretention time
Core Design Contradiction:
Ease of manufactureVSDuration of action of stationary object

Solution Approach 1:

The patent improves retention time by utilizing the thyristor's bistable state characteristic with hysteresis window, which maintains stable data storage for longer durations without requiring frequent refresh operations, while remaining compatible with conventional manufacturing processes

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed memory structure achieves a large sensing margin of current between logic states, increased retention and read-disturb-free times, and improved scalability and speed, making it a promising candidate for DRAMs.

Implementation Method 1

The memory structure is operated by an operating mechanism of a thyristor... adjustment of hysteresis windows

Methodology Applied
Scientific EffectHysteresis: Hysteresis

Data Source

PatentUS20240008249A1Memory structure
Publication Date: 2024.01.04 MACRONIX INTERNATIONAL CO LTD
  • US20240008249A1 patent drawing
  • US20240008249A1 patent drawing
  • US20240008249A1 patent drawing

AI summary

A memory structure includes a substrate, a first gate structure, a second gate structure, a third gate structure, and channel bodies separated from each other and passing through the first gate structure, the second gate structure and the third gate structure along a first direction. The first gate structure, the second gate structure and the third gate structure are disposed on the substrate, and are separated from each other along the first direction and extend respectively along a second direction and a third direction. The first gate includes first, second and third island structures respectively extending along the third direction and separated from each other along the second direction. The third gate structure includes fourth, fifth and sixth island structures respectively extending along the third direction and separated from each other along the second direction.