A protective insulating layer and liner isolate the gate from source/drain regions to cut leakage and preserve insulating layer integrity.
Graded indium concentration in oxide semiconductor channels boosts carrier mobility while limiting process damage in stacked 3D memory cells.
Island-shaped diode regions in an RC-IGBT improve thermal exchange with the IGBT region, reducing local chip heating and thermal resistance.
Series-stacked MOSFET cells emulate longer-channel and higher-voltage devices at newer nodes while cutting die area and parasitic capacitance.
Dummy epitaxial regions raise open ratio above 5.2% to stabilize source/drain growth in mixed-voltage chips and protect low-voltage transistor reliability.
Selective agent-assisted deposition forms different silicides on N- and P-type epitaxy regions without extra lithography, cutting process complexity.
Mixed polysilicon and oxide TFTs with tailored gate insulator thickness improve current control, leakage, mobility, and stability in displays.
Multiple fluorination steps replenish fluorine in hafnium gate dielectrics after deposition and etching, improving defect repair and transistor reliability.
Opposite-polarity doping in selected GAA nanostructures suppresses source-drain leakage at scaled nodes without sacrificing on-current.
Selective inactive fins beside source/drain epitaxy open active fin spacing, widen the process window, and lower electrical bridging risk.
Low-permittivity isolation around charge readout circuits reduces parasitic capacitance in 3D stacked imaging hardware and improves signal conversion.
PECVD-formed conformal titanium silicide coats source/drain and spacer sidewalls to cut FinFET contact resistance and remove cleaning and annealing.
Varying gate electrode thickness modulates threshold voltage without doping, improving switching speed, mobility, and consistency.
A photocoupler forces rapid transistor turn-off during short circuits, protecting battery packs while avoiding charge-pump power loss.
Stacked semiconductor layers form a wraparound nanowire gate that improves channel control, suppresses short-channel effects, and boosts GAA FET current.
Thermal oxidation condenses Ge in stacked Si/SiGe GAA fins, easing lattice mismatch while improving n- and p-channel transistor performance.
Selective diffusion breaks on upper and lower transistor stacks improve isolation and stress control without sacrificing semiconductor density.
A molybdenum-rich wiring stack uses oxide and nitride thickness offset to strengthen insulation bonding and prevent peeling damage.
Specialized OLED pixel transistors and sensing lines cut leakage and voltage drop, enabling low-refresh operation with stable image quality.
Dummy gate interconnects and nanosheet pads stabilize nanosheet FET performance, cut off-current impact, and improve manufacturing yield.
Wrap-around source and drain contacts enlarge interface area on transistor sidewalls and tops, cutting contact resistance without increasing footprint.
Vertically stacked silicon and SiGe nanowires with gate-all-around control improve mobility, isolation, and scaling beyond 15 nm.
Thermal diffusion of recessed p-type dipole layers enables multiple threshold voltages in nanosheet gate stacks despite hard mask solubility limits.
A damascene-like isolation structure avoids peeling in narrow dielectric spacing, extending interconnects while lowering contact resistance.
A dielectric seal layer blocks oxidant migration during NVM thermal processing, preserving logic and BCD doping profiles and yield.
A selective etch stop layer controls gate and source/drain via etching, preventing dielectric over-etch and leakage in multi-gate transistors.
An oxide etch stop layer and halogen plasma improve replacement contact selectivity, limiting sidewall loss and critical dimension erosion.
Active voltage sensors compare switch voltages to control dead time and zero-voltage switching, reducing converter loss, heat, and size.
A recessed source/drain contact wrapped by silicide expands nanosheet contact area to cut resistance and improve carrier mobility and drive current.
A heat-formed buffer layer and sacrificial replacement sequence prevents active-region leaning and preserves electrical characteristics at high integration.
Dielectric-separated GAA gate segments use a metal overlayer to restore connectivity while reducing misalignment risk in compact semiconductor structures.
A low-k core and high-k shell in a fin trench cut cell capacitance while preserving etch resistance and reducing fabrication defects.
A vertical gate channel links larger light-sensitive pixel areas to circuit wafers, improving quantum efficiency, full well capacity, and dark current.
Plasma nitridation builds a thicker trench-bottom dielectric to prevent voids and seals, improving gate-to-gate isolation in GAA FETs.
An SDB trench and T-shaped isolation structure improve FinFET channel and threshold control while reducing DIBL and short-channel effects.
A graded boron epitaxial source/drain profile lowers Schottky barrier height and parasitic resistance in p-type FinFETs.
A wrap-around silicide and backside conductive via cut source-drain resistance, improving current flow while reducing transistor power use and heat.
Direct vertical contacts link 3D memory conductive lines to circuitry, cutting interconnect area, parasitic current loss, and component count.
Direct backside source/drain contacts remove through vias, simplifying transistor power routing while supporting scaling and reducing BEOL congestion.
Forming the metal gate cut after gate replacement improves FinFET gate fill uniformity, reduces defects, and eases narrow-region deposition.
A self-aligned cut metal gate with dummy fin barriers enables dense stacked GAA transistors while limiting parasitic capacitance and dielectric breakdown.
Opposed conductive contact trenches induce compressive strain to boost carrier mobility while improving heat dissipation in semiconductor bodies.
Direct oxide bonding and thin interconnects replace large TSV limits, enabling denser 3D single-crystal logic and memory integration.
Series BJT-SCR coupling lowers ESD clamping and holding voltages while preserving robustness and preventing latch-up in protected circuits.
A staircase gate-and-insulator stack uses segmented pads and insulating protrusions to ease dense gate connections and reduce defects.
Vertical pixel-readout separation and tailored wiring layout reduce dark noise and congestion while improving sensitivity, speed, and layout flexibility.
A 3D MOSFET layout expands effective area to improve MFMIS capacitance matching without shrinking MFM area or sacrificing drain current.
Monolithically integrated switching regions and bond pads on both chip sides raise power density, shrink package size, and simplify production.
Dual temporal circuits encode light energy as pulse widths, enabling analog motion detection and image output without frame buffers.