Tilted Mask Assembly for Precise Display Pattern Deposition

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Solution Overview

Problem

The existing manufacturing processes for display devices face challenges in accurately depositing materials due to deformation of the mask assembly, which affects the quality of the image emitted by the display device.

Innovation Solution

A display device manufacturing apparatus and method that includes a mask assembly tilted with respect to a plane parallel to the ground, featuring a mask frame with a flat surface and a mask sheet coupled to it, supported by a support unit, and a deposition source with a tilted nozzle portion, to reduce deformation and ensure precise pattern deposition.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a mask assembly is used to form pattern-shaped intermediate layers on a substrate, then the image quality of the display device is improved, but the mask assembly deforms during the deposition process, reducing manufacturing precision

Engineering Contradiction:
Improvepattern deposition accuracyVSAvoidmask assembly deformation
Core Design Contradiction:
Manufacturing precisionVSStability of the object's composition

Solution Approach 1:

The mask assembly is tilted at a specific angle (e.g., 45 degrees) relative to the substrate during deposition. This angular arrangement changes the spatial dimension of the deposition process, allowing the mask to maintain structural stability while enabling precise material deposition through the tilted configuration, thereby preventing deformation-induced pattern distortion

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The deposition process parameters are optimized for tilted mask operation, including adjusting deposition rate, gas flow rates, and temperature profiles to compensate for the tilted geometry. This parameter optimization ensures uniform material deposition through the mask pattern while maintaining mask structural integrity throughout the process

Inventive Principle:
Principle #35Parameter changes

2Stability of the object's composition

If the mask assembly is tilted with respect to a plane parallel to the ground, then mask assembly deformation is reduced, but the device complexity increases

Engineering Contradiction:
Improvemask assembly deformationVSAvoidmask assembly structure
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The mask assembly is divided into modular components including a mask frame, mask sheet, and support members that can be independently manufactured and assembled. This segmentation allows each component to be optimized for its specific function while reducing overall structural complexity and facilitating easier maintenance and replacement

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Support members are introduced as intermediary elements between the mask frame and the deposition chamber environment. These support members provide mechanical stabilization to the tilted mask assembly, distributing structural loads and preventing deformation without requiring complex reinforcement of the entire mask structure

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables the production of display devices with improved image quality by minimizing mask assembly deformation, resulting in more accurate and uniform deposition of materials, thereby enhancing pixel position accuracy and overall image clarity.

Implementation Method 1

depositing a deposition material on the display substrate by passing the deposition material through the mask assembly

Methodology Applied
Scientific EffectPhysical Vapour Deposition: Physical Vapour Deposition

Data Source

PatentEP4273293A1Apparatus and method for manufacturing display device
Publication Date: 2023.11.08 SAMSUNG DISPLAY CO LTD
  • EP4273293A1 patent drawingFigure 1
  • EP4273293A1 patent drawingFigure 2
  • EP4273293A1 patent drawingFigure 3

AI summary

An apparatus for manufacturing a display device includes: a mask assembly tilted with respect to a plane parallel to the ground; a deposition source facing the mask assembly; and a carrier facing the mask assembly and configured to support a display substrate. The mask assembly includes: a mask frame having a flat surface; and a mask sheet having an end on the flat surface of the mask frame and coupled to the mask frame.