Tilted Mask Assembly Support for Accurate Display Layer Deposition
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Solution Overview
Problem
The challenge in manufacturing display devices is the deformation of mask assemblies during the deposition process, which affects the accuracy and quality of the intermediate layers, leading to inconsistent image quality due to sagging and bending issues.
Innovation Solution
An apparatus and method involving a mask assembly tilted between 3° to 14° with respect to a plane parallel to the ground, supported by a unique support unit and a deposition source with a tilted nozzle, to minimize deformation and ensure precise deposition on the display substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the mask assembly is disposed horizontally parallel to the ground, then the deposition process is simple, but the mask assembly deforms due to sagging and bending, reducing manufacturing precision
Solution Approach 1:
The mask assembly is tilted at an angle of 5° to 15° relative to the horizontal plane, creating an asymmetric configuration that prevents uniform sagging and bending across the mask structure. This asymmetric tilt angle distributes mechanical stresses unevenly, reducing overall deformation and maintaining pattern accuracy during the deposition process.
Solution Approach 2:
The tilt angle of the mask assembly is optimized within a specific range (5° to 15°) to balance between reducing deformation and maintaining ease of manufacture. By changing this geometric parameter, the system achieves reduced sagging and bending while keeping the deposition process relatively simple and the support structure manageable.
2Manufacturing precision
If the mask assembly is tilted to reduce deformation, then manufacturing precision improves, but the support structure becomes more complex
Solution Approach 1:
The support unit is divided into multiple discrete support blocks positioned at specific locations beneath the mask assembly. These segmented support blocks provide localized support at critical points, effectively counteracting deformation caused by the tilt angle while keeping each individual support element simple and manageable.
Solution Approach 2:
The support structure extends into the vertical dimension by positioning support blocks at different heights and locations beneath the tilted mask assembly. This three-dimensional support arrangement accommodates the tilt angle while providing necessary structural support, managing complexity through spatial distribution rather than planar complexity.
3Manufacturing precision
If the mask assembly is tilted, then deformation is reduced, but the deposition source and carrier alignment becomes more difficult
Solution Approach 1:
The deposition source and carrier are both tilted at the same angle as the mask assembly (5° to 15°), creating a coordinated asymmetric configuration. This synchronized tilt ensures that all three components remain parallel to each other, maintaining proper alignment and deposition uniformity while accommodating the mask's reduced-deformation tilt angle.
Solution Approach 2:
The tilted configuration serves multiple functions simultaneously: it reduces mask deformation, maintains component alignment through coordinated tilting, and ensures uniform deposition across the substrate. By making the tilt angle a universal parameter applied to all components, the system achieves multiple benefits with a single design decision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces mask assembly deformation, enhances pixel position accuracy, and improves the uniformity of the deposition process, resulting in higher image quality and consistent display device performance.
Implementation Method 1
a source portion configured to accommodate and heat a deposition material; and a nozzle portion connected to the source portion and configured to spray the heated deposition material
Implementation Method 2
a magnetic force generator on a rear surface of the carrier body. The magnetic force generator may be on a side surface of the carrier body
Data Source
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AI summary
An apparatus for manufacturing a display device includes: a mask assembly tilted with respect to one plane parallel to a ground; a support unit configured to support one surface of the mask assembly and to support a lower surface of the mask assembly; a deposition source arranged to face the mask assembly; and a carrier arranged to face the mask assembly and configured to support a display substrate.