Tilted Mirror Fabry-Perot Filter for Tunable Spectral Resolution

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Solution Overview

Problem

Prior-art tunable spectral filters are often slow, have limited tuning range, poor spectral resolution, and are complex to implement, making them inadequate for wide spectral range applications such as hyperspectral imaging and spectrometry.

Innovation Solution

A Fabry-Perot cavity-based spectral filter with one planar mirror tilted relative to the other, allowing a linear gradient in cavity length, enabling control over both the absolute wavelengths and spectral range, and using vertical actuators to control mirror separation and tilt, resulting in high spectral resolution and tunability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a conventional tunable Fabry-Perot cavity is used, then the center wavelength can be tuned, but the tuning range is limited and the spectral resolution is poor

Engineering Contradiction:
Improvespectral resolutionVSAvoidtuning range
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The patent applies dynamics by making the cavity length continuously variable through a deformable spacer that can be dynamically adjusted. This allows the Fabry-Perot cavity to transition from a fixed-geometry structure to one where the cavity length can be changed in real-time, enabling both high spectral resolution (when cavity length is precisely controlled) and wide tuning range (when cavity length is varied across multiple values).

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent changes the physical parameter of cavity length to resolve the contradiction. By using a deformable spacer, the cavity length can be varied continuously, which simultaneously enables wide spectral tuning range while maintaining the ability to achieve high spectral resolution at any desired wavelength through precise control of the cavity length parameter.

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If the cavity length is changed to tune the wavelength, then the wavelength can be adjusted, but the response speed is slow

Engineering Contradiction:
Improvewavelength tuningVSAvoidtuning speed
Core Design Contradiction:
Adaptability or versatilityVSSpeed

Solution Approach 1:

The patent replaces traditional mechanical adjustment mechanisms (such as motorized stages or piezoelectric actuators) with an electrostatic actuation system. The deformable spacer is actuated by electrostatic forces, which respond much faster than mechanical systems. This substitution enables rapid wavelength tuning while maintaining precise control over the cavity length.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent utilizes the phase transition or state change concept by employing a deformable spacer that can rapidly change its physical state or configuration in response to electrostatic actuation. This allows the cavity length to be adjusted quickly without the inertial limitations of mechanical systems, achieving fast wavelength tuning.

Inventive Principle:
Principle #36Phase transitions

3Measurement precision

If prior-art tunable spectral filters are implemented, then some spectral filtering is achieved, but the device complexity increases

Engineering Contradiction:
Improvespectral filtering capabilityVSAvoidsystem complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent merges multiple functions into a single integrated structure. The deformable spacer simultaneously serves as the tuning mechanism and the structural element defining the cavity length, eliminating the need for separate mechanical adjustment mechanisms. This integration reduces device complexity while maintaining spectral filtering capability and tunability.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The deformable spacer acts as a multi-functional element that provides both structural support for the Fabry-Perot cavity and the tuning mechanism for wavelength adjustment. This universal component performs multiple functions (mechanical support, cavity length definition, and active tuning), thereby reducing the overall device complexity compared to systems requiring separate components for each function.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides high spectral resolution over wide spectral ranges, enhancing the performance of hyperspectral imaging systems and spectrometers by allowing precise control over the spectral content and resolution, improving the quality factor of the cavity and sensitivity.

Implementation Method 1

Light having wavelength, λ, will resonate back and forth between the mirrors inside the optically resonant cavity when its cavity length, L, is equal to an integer number, N, of half-wavelengths (i.e., when L=Nλ/2) and be transmitted through the cavity with low loss. At the same time, light characterized by other wavelengths will be reflected by the FP cavity.

Methodology Applied
Scientific EffectOptical resonance: Resonance

Implementation Method 2

one planar mirror that can be tilted relative to the other planar mirror along at least a first direction to realize a cavity length having a linear gradient along that direction. At each point along the first direction, therefore, the FP cavity has a different cavity length and passes a different wavelength at that point.

Methodology Applied
Scientific EffectLinear gradient in cavity length:

Data Source

PatentEP3631389B1Spectral filter having controllable spectral bandwidth and resolution
Publication Date: 2025.03.26 CALIFORNIA INST OF TECH
  • EP3631389B1 patent drawingFigure 1
  • EP3631389B1 patent drawingFigure 2A~2B
  • EP3631389B1 patent drawingFigure 3A~3C

AI summary

A Fabry-Perot cavity-based spectral notch filter is disclosed, where the filter is operative for providing an output optical signal whose spectral content is spatially dispersed along at least one direction, while also controlling the spectral position and spectral range of the output light. In some embodiments, the spectral filter is integrated with a detector arrays to realize a compact, high-resolution spectrometer that can rapidly acquire the absorption spectrum of a sample with high sensitivity.