TMR Sensor 3-Axis Sensing via Magnetization Merging
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Solution Overview
Problem
Existing magnetic field sensing technologies using tunneling magneto-resistor (TMR) devices face challenges in achieving accurate and cost-effective 3-axis magnetic field sensing due to the need for multiple MTJ devices, which increases fabrication costs and can result in low yield and loss of linearity and accuracy in sensing.
Innovation Solution
The method involves using a pair of TMR sensors with specific angle configurations of their free magnetizations relative to pinned directions in alternating periods to sense magnetic fields, allowing for the summation of conductance differences to determine magnetic field intensity, reducing the number of required MTJ devices and improving sensing accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple MTJ devices are used to achieve accurate 3-axis magnetic field sensing, then sensing accuracy is improved, but fabrication cost increases and yield decreases
Solution Approach 1:
The patent combines multiple sensing functions into a single MTJ device by utilizing different magnetization orientation configurations (first and second magnetization directions) within the same device structure. This allows one device to perform what previously required multiple separate devices, thereby reducing fabrication cost and improving yield while maintaining sensing accuracy.
Solution Approach 2:
The MTJ device is designed with multi-functionality by incorporating both first and second magnetization directions that can be selectively activated. This universal design enables the single device to sense magnetic fields in multiple directions (3-axis sensing capability), replacing the need for multiple specialized devices and resolving the contradiction between accuracy and device complexity.
2Measurement precision
If multiple MTJ devices are used for 3-axis magnetic field sensing, then sensing accuracy is improved, but manufacturing cost increases
Solution Approach 1:
The patent merges multiple sensing functions into a single MTJ device structure, eliminating the need to fabricate and integrate multiple separate devices. This reduces manufacturing steps, material costs, and assembly complexity, thereby lowering fabrication cost while maintaining the accuracy required for 3-axis magnetic field sensing.
3Adaptability or versatility
If multiple MTJ devices are used for magnetic field sensing, then sensing capability is improved, but yield decreases
Solution Approach 1:
By combining multiple sensing capabilities into a single device, the patent eliminates the yield losses associated with manufacturing and testing multiple separate MTJ devices. The single device approach ensures consistent performance and reliability while maintaining comprehensive sensing capability across multiple axes.
4Device complexity
If asymmetric half range operation is used in bridge circuit for TMR sensors, then device structure is simplified, but linearity and accuracy are lost
Solution Approach 1:
The patent employs asymmetric magnetization configurations (first and second magnetization directions at different angles) within the MTJ device to achieve symmetric response characteristics. This allows the device to operate in a full range mode with improved linearity and accuracy, eliminating the need for asymmetric bridge circuit configurations and their associated performance losses.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the accuracy and reduces the number of MTJ devices needed, thereby lowering fabrication costs and improving yield while maintaining sensing precision across multiple axes.
Implementation Method 1
magnetic field sensing methods and apparatuses using tunneling magneto-resistor devices
Implementation Method 2
the first free magnetization being set to be parallel to the easy-axis and to have a first angle Phi to the first pinned direction
Data Source
AI summary
Magnetic field sensing method and apparatus of this disclosure uses two tunneling magneto-resistor (TMR) devices. Angles of the free magnetizations of the two TMR devices with respect to a fixed direction are set in a first to fourth period. In the first to fourth period, the two TMR devices act as a TMR sensing unit and a zero-field reference unit by turns, and each of the conductance difference between the sensing unit and the zero field reference unit is also obtained in each of the first to fourth period. Finally, the four conductance differences are summed up.


