Top Opening Mechanism for Semiconductor Containers
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Solution Overview
Problem
Conventional containers for semiconductor processing and inspection apparatuses with side opening doors or lids have limited accessibility, reducing workability and reliability during maintenance, while fully opening the top is difficult due to weight and structural constraints, leading to increased downtime.
Innovation Solution
A top opening-closing mechanism featuring a rolling element, rail, and lifting unit allows the top of the container to be easily lifted and laterally moved, using a spur gear and rack gear system for smooth operation, and includes a horizontal position maintaining mechanism to prevent load concentration and facilitate accessory movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If side opening doors or lids are used in conventional containers, then structural integrity is maintained, but accessibility for maintenance is limited
Solution Approach 1:
The container top is segmented from the container body, allowing it to be independently removed. The top includes a lid portion that can be completely detached from the container body through the opening mechanism, providing full accessibility to the internal space while maintaining structural integrity when closed.
Solution Approach 2:
A rolling element acts as an intermediary between the top and container body during the opening process. The rolling element facilitates smooth transition and movement of the top from its closed position to the fully opened position, reducing friction and enabling easier operation.
2Ease of operation
If the top is fully opened for maintenance, then accessibility is improved, but the weight and structural constraints make it difficult to open
Solution Approach 1:
The opening mechanism incorporates a lifting unit that provides upward force to counteract the weight of the top. This lifting unit reduces the effective weight that operators must manage, enabling easy opening and closing of the heavy top without requiring excessive manual effort.
Solution Approach 2:
The traditional mechanical lifting system is replaced with a rolling element mechanism combined with a lifting unit. The rolling element converts sliding friction into rolling friction, significantly reducing the force required to move the top, while the lifting unit provides mechanical assistance to overcome gravity.
3Productivity
If the top is opened rapidly, then maintenance time is reduced, but control and safety may be compromised
Solution Approach 1:
The opening mechanism is designed with dynamic characteristics that allow rapid movement while maintaining control. The rolling element and lifting unit work together to provide smooth acceleration and deceleration, enabling the top to be opened quickly yet safely without sudden movements or loss of control.
Solution Approach 2:
The mechanism incorporates feedback through the interaction between the rolling element and the rail structure. This feedback provides operators with tactile information about the top's position and movement status, allowing them to control the opening process rapidly yet safely by feeling the resistance and position changes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and rapid opening and closing of the container top, reducing maintenance time and downtime by improving accessibility and workability without complex operations.
Implementation Method 1
the rolling element rolls on the rail and the top resting table
Implementation Method 2
an elastic body on one side thereof is disposed so that the elastic body faces the front surface portion or the back surface portion of the reflecting mirror mounted on the seat surface. While the elastic body is pressed against the front surface portion or the back surface portion of the reflecting mirror, and the elastic body is elastically urged to a surface opposite to the surface against which the elastic body is pressed
Data Source
AI summary
A top opening-closing mechanism for opening and closing a top of a container including a container body and the top includes a rolling element rotatably provided at the top and positioned on the outside of the container body in a planar view, a rail, a jack for lifting the rail, and a top resting table disposed adjacent to the container and mounting the top thereon. When the top is opened, the jack lifts the rail, the rail lifts the rolling element from below, and thereby the top is lifted up from the container body. Then, the rolling element rolls on the rail and the top resting table to move the top from above the container body to the top resting table.