Top Ring Retainer Guiding Device for Quadrangular Substrate Processing

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Large and heavy quadrangular substrates, such as CCL, PCB, photomask, and display panels, often warp and deform, making them difficult to process using conventional technology designed for circular substrates, as there are no standardized dimensions for these substrates and existing processing apparatuses are not equipped to handle substrates of varying sizes effectively.

Innovation Solution

A top ring with a substrate supporting surface, a retainer member surrounding the periphery, and a retainer guiding device that allows perpendicular displacement of the retainer member to prevent it from moving away from the substrate, ensuring secure holding and processing of substrates with great dimensions, featuring a retainer guiding device inside the retainer member and utilizing an elastic membrane for pressure adjustment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If conventional processing apparatuses designed for circular substrates are used, then standardized circular substrates can be processed efficiently, but large and heavy quadrangular substrates cannot be processed due to warping and deformation

Engineering Contradiction:

Improvesubstrate size and shape adaptabilityVSAvoidsubstrate processing reliability

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

The top ring is divided into a fixed ring body and a movable retainer member that can independently adjust position and pressure. This segmentation allows the retainer to adapt to different substrate sizes and shapes while the fixed ring body maintains structural stability, resolving the contradiction between adaptability and reliability.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The retainer member is designed with movable capability in the vertical direction, allowing it to dynamically adjust its position and applied pressure based on the specific substrate being processed. This dynamic adjustment enables reliable processing of various substrate types without warping or deformation.

Inventive Principle:

Principle #15Dynamics

2Adaptability or versatility

If the retainer member is made movable to adjust for different substrate sizes, then adaptability improves, but the retainer member may displace horizontally and lose positioning accuracy

Engineering Contradiction:

Improvesubstrate size adjustment capabilityVSAvoidretainer positioning precision

Core Design Contradiction:

Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The guiding device applies localized constraints specifically to the horizontal movement of the retainer member while allowing vertical movement. This localized quality control ensures positioning precision is maintained in the horizontal direction while adaptability is preserved through vertical adjustment capability.

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The guiding device acts as an intermediary mechanism between the movable retainer member and the fixed ring body. It mediates the movement by allowing vertical displacement for adaptation while preventing horizontal displacement that would compromise positioning precision.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Manufacturing precision

If the retainer member is constrained to prevent horizontal displacement, then positioning precision is maintained, but the ability to adjust for different substrate sizes is reduced

Engineering Contradiction:

Improveretainer positioning precisionVSAvoidsubstrate size adjustment capability

Core Design Contradiction:

Manufacturing precisionVSAdaptability or versatility

Solution Approach 1:

The retainer member is designed with selective mobility - movable in the vertical direction for adaptation but constrained in the horizontal direction for precision. This dynamic design with directional freedom resolves the contradiction by allowing adjustment capability where needed while maintaining precision where required.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

Different movement freedoms are applied to different directions: vertical movement is permitted for adaptability while horizontal movement is constrained for precision. This local quality differentiation in movement constraints resolves the contradiction between adaptability and positioning precision.

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables efficient processing of large and heavy substrates by maintaining substrate flatness and preventing deformation during polishing, allowing for consistent processing across various substrate sizes and shapes.

Implementation Method 1

utilizing an elastic membrane for pressure adjustment

Methodology Applied

Scientific EffectElasticity: Elasticity

Data Source

PatentUS11400561B2Top ring for holding a substrate and substrate processing apparatus

Publication Date: 2022.08.02 EBARA CORP

AI summary

According to one embodiment, there is provided a top ring for holding a substrate. The top ring comprises a substrate supporting surface, a retainer member disposed to surround an outer periphery of the substrate supporting surface, and a retainer guiding device configured to guide the retainer member so as to allow the retainer member to be displaced in a direction perpendicular to the substrate supporting surface, and support the retainer member so as to inhibit the retainer member from being displaced in a direction parallel to and away from the substrate supporting surface. The retainer guiding device is disposed in an inner side of the retainer member surrounding the substrate supporting surface.