Toroidal Ferromagnetic Core Plasma Generator for Low Ion Energy
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current plasma generation apparatuses face challenges in generating high-density plasma at low pressure and temperature, with high ion energy and plasma electric potential, leading to substrate defects and inefficiencies in processes like low-temperature polysilicon deposition and organic electroluminescent device manufacturing.
Innovation Solution
A plasma generation apparatus utilizing a toroidal core with a ferromagnetic material, where the toroidal antenna is combined with the chamber lid and includes an induction coil and matching circuit to generate a high-density plasma with controlled electron energy and ion energy, and features a cooling system to maintain the ferromagnetic properties and efficient energy transmission.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional plasma generation apparatuses are used, then plasma can be generated, but the ion energy and plasma electric potential are high causing substrate defects
Solution Approach 1:
The patent changes the fundamental parameters of plasma generation by using a toroidal core with ferromagnetic material instead of conventional linear antennas. This alters the electromagnetic field distribution, creating a time-varying magnetic field that induces electric fields with different characteristics. The result is plasma with lower ion energy and electric potential, eliminating substrate damage while maintaining plasma generation functionality.
Solution Approach 2:
The invention employs a composite structure combining a toroidal geometric form with ferromagnetic material properties. This composite approach enables the core to concentrate and guide magnetic flux effectively, creating a unique field distribution pattern that produces plasma with controlled energy characteristics suitable for sensitive substrate processing.
2Productivity
If conventional plasma generation methods are used, then plasma is generated, but deposition efficiency and film quality are insufficient for large-sized substrates
Solution Approach 1:
The toroidal core structure introduces a dimensional change from conventional linear or planar antenna configurations to a three-dimensional toroidal geometry. This spatial transformation creates a more uniform and concentrated electromagnetic field distribution over the substrate area, enabling simultaneous high-speed deposition with uniform film quality across large substrate surfaces.
Solution Approach 2:
The ferromagnetic toroidal core creates localized regions of enhanced magnetic flux density and induced electric field strength directly over the substrate area. This local concentration of energy enables efficient plasma generation and high-rate deposition precisely where needed, while maintaining controlled energy levels for high-quality film formation.
3Quantity of substance
If high-power RF is applied to generate plasma, then plasma density increases, but energy loss and heat generation increase
Solution Approach 1:
The ferromagnetic toroidal core acts as an intermediary element that couples the RF power source to the plasma more efficiently. It concentrates and guides magnetic flux, reducing energy leakage and improving power transfer efficiency. This intermediary structure enables high plasma density to be achieved with lower input power, reducing overall energy loss.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively generates high-density plasma with low ion energy and plasma electric potential, improving film quality and deposition efficiency, especially for large-sized substrates, while maintaining the ferromagnetic properties and reducing substrate defects.
Implementation Method 1
an induction coil rolling the first portion; when the RF power supply is applied to the RF antenna, a time-varying magnetic field having a vertical direction occurs and an electric field is induced by the time-varying magnetic field
Implementation Method 2
a toroidal ferromagnetic core combined with the chamber, the toroidal ferromagnetic core having a first portion outside the chamber and a second portion inside the chamber
Data Source
AI summary
A plasma generation apparatus includes: a chamber having a chamber lid and defining an airtight reaction region; a susceptor in the chamber; a gas supply means supplying a process gas to the chamber; and a toroidal core vertically disposed with respect to the susceptor through the chamber lid, comprising: a toroidal ferromagnetic core combined with the chamber, the toroidal ferromagnetic core having a first portion outside the chamber and a second portion inside the chamber, the second portion having an opening portion; a radio frequency (RF) power supply connected to the chamber; an induction coil electrically connected to the RF power supply, the induction coil rolling the first portion; and a matching circuit matching an impedance between the RF power supply and the induction coil.