Touch Display Control for Semiconductor Inspection Equipment
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Solution Overview
Problem
Conventional methods for controlling the movement of wafer chucks, image-capturing modules, and probe stations in semiconductor inspecting equipment are not user-friendly or efficient, lacking the use of touch signals for direct and intuitive control.
Innovation Solution
A method that utilizes a touch display to display a wafer graphic, detects touch signals, and determines the moving speed and direction of movable elements based on the graphic's magnification, allowing operators to control the movement of wafer chucks, image-capturing modules, and probe stations through intuitive gestures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If conventional control methods (toggles, mice, buttons) are used to control movable elements, then the control system is simple and reliable, but the ease of operation and user-friendliness deteriorate
Solution Approach 1:
The patent replaces conventional mechanical control interfaces (toggles, mice, buttons) with a touch display interface that detects touch signals. This substitution allows operators to directly touch and drag the wafer graphic on the display to control movable elements, significantly improving ease of operation while integrating the control function into the existing display system rather than adding separate mechanical controls
Solution Approach 2:
The patent introduces a touch signal as an intermediary between the operator and the movable elements. The touch display detects operator input and translates it into control signals that adjust movement speed and direction based on graphic magnification, providing a more intuitive and user-friendly control mechanism without requiring complex additional hardware
2Productivity
If fixed movement speed is used for movable elements, then the control system is simple, but the productivity and inspection efficiency deteriorate
Solution Approach 1:
The patent implements dynamic movement speed control where the movable element's speed is not fixed but adjusts based on the magnification of the wafer graphic displayed. When the graphic is magnified, the movement speed decreases to allow precise positioning; when magnification is reduced, speed increases to cover larger areas quickly, thereby improving overall inspection productivity
Solution Approach 2:
The system continuously monitors the magnification level of the displayed wafer graphic and uses this information as feedback to automatically adjust the movement speed of the movable element. This closed-loop control ensures optimal speed selection based on current display conditions, enhancing both productivity and operational simplicity
3Ease of operation
If touch display control with magnification-based speed adjustment is implemented, then the ease of operation and productivity improve, but the device complexity increases
Solution Approach 1:
The patent makes the touch display serve multiple functions: it displays the wafer graphic, detects operator touch input, determines magnification level, and generates control signals for movable element movement. By integrating these functions into a single interface, the system improves ease of operation without proportionally increasing device complexity, as the touch display itself performs all these roles
Data Source
AI summary
The instant disclosure provides an operating method of inspecting equipment, with the method applicable to semiconductor inspecting equipment having a movable element. The method includes: displaying a wafer graphic by a touch display; detecting a touch signal generated by the touch display; detecting the magnification of the wafer graphic when the touch signal is generated; and determining the moving speed of the movable element based on the magnification of the wafer graphic when the touch signal is generated. In addition, the moving direction of the movable element can be determined according to the touch signal. Through the instant disclosure, the operator can more intuitively operate each movable element of semiconductor inspecting equipment.