Transfer Device Sensor-Based Position Teaching
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing substrate processing systems face challenges in accurately teaching the transfer position of transfer devices, leading to deviations and reduced transfer accuracy of substrates.
Innovation Solution
A transfer teaching method that involves moving the transfer device over the substrate placed on a placing location, detecting the substrate using sensors, calculating its position, and setting the transfer position based on this calculation to correct for deviations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the transfer device uses pre-taught positions for substrate transfer, then the system operation is simple, but the transfer accuracy deteriorates due to position deviations
Solution Approach 1:
The transfer device performs self-teaching by automatically detecting the substrate position on the placing location and calculating the deviation, then setting the transfer position based on this detected information. This eliminates the need for manual teaching operations while achieving high transfer accuracy through the device's own sensor-based measurement system.
Solution Approach 2:
The patent replaces manual mechanical teaching operations with an automated sensor-based detection system. The sensor detects the substrate position, and the control unit calculates the deviation and sets the transfer position automatically, substituting manual measurement and adjustment with electronic sensing and computation.
2Manufacturing precision
If manual teaching of transfer position is performed, then transfer accuracy can be improved, but the teaching time and operation complexity increase
Solution Approach 1:
The transfer device autonomously performs position detection and teaching without requiring manual intervention. The sensor automatically detects the substrate position, the control unit calculates the deviation, and the transfer position is set automatically, eliminating time-consuming manual teaching operations while maintaining high accuracy.
Solution Approach 2:
The patent substitutes manual teaching operations with automated sensor-based detection and electronic calculation. The sensor rapidly detects substrate position, and the control unit computes the deviation and sets the transfer position instantly, replacing time-consuming manual measurement and adjustment with rapid electronic processing.
3Device complexity
If the transfer device does not account for position deviations, then the device complexity is low, but the transfer accuracy deteriorates
Solution Approach 1:
The patent introduces a sensor-based detection system and electronic calculation to compensate for position deviations. The sensor detects the actual substrate position, the control unit calculates the deviation from the expected position, and adjusts the transfer position accordingly, using electronic measurement and computation to achieve high accuracy without complex mechanical adjustment mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method efficiently teaches the transfer position and significantly improves the transfer accuracy of substrates by accounting for actual deviations during the teaching process.
Implementation Method 1
detecting the transfer object using a sensor of the transfer device
Data Source
AI summary
A transfer teaching method for teaching a transfer position of a transfer device to transfer a transfer object using the transfer device is provided. The method comprises (A) moving the transfer device with respect to the transfer object placed on a placing location and detecting the transfer object using a sensor of the transfer device, (B) calculating a position of the transfer object based on the detected transfer object, and (C) setting the transfer position based on the calculated position of the transfer object.