Transfer Hand Position Calibration via Scanning Detection
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Solution Overview
Problem
Existing substrate transfer systems face challenges in accurately calibrating the position of a hand that supports substrates, particularly in detecting positional deviations and inclinations, which can lead to misalignment during processing.
Innovation Solution
A transfer system with a hand, arm, and controller that moves the hand along intersecting scanning directions defined by non-parallel lines, using sensors to detect positional deviations based on the timing of these lines reaching reference positions, allowing for precise calibration and correction of the hand's position.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a teaching jig with the same dimension as the actual wafer is placed in a processing apparatus to teach the robot position, then the robot can be taught the position, but the method does not enable detection and correction of positional deviations and inclinations of the hand
Solution Approach 1:
The patent introduces an intermediary detection system consisting of sensors and reference positions that mediate between the hand's actual position and the robot's position teaching. This intermediary system enables precise measurement of positional deviations and inclinations by detecting the hand's position relative to known reference positions, thereby resolving the contradiction between basic position teaching and precise alignment reliability.
Solution Approach 2:
The patent replaces the purely mechanical position teaching method with an optical/electronic detection system. Instead of relying solely on mechanical teaching jig placement, the system uses sensors to detect positional deviations and inclinations, substituting mechanical measurement with optical or electromagnetic field-based measurement for higher precision and reliability.
2Productivity
If the hand position is not accurately calibrated, then the transfer system can operate, but misalignment occurs during substrate processing
Solution Approach 1:
The patent implements preliminary position calibration and detection before substrate processing begins. The system pre-detects the hand's positional deviations and inclinations relative to reference positions, and performs necessary corrections in advance. This preliminary action ensures that when substrate processing occurs, the hand is already accurately positioned, preventing misalignment while maintaining productivity.
Solution Approach 2:
The patent establishes a feedback mechanism where the detection system continuously monitors hand position and provides information back to the control system. Based on this feedback about positional deviations and inclinations, the system can make real-time corrections to hand positioning, ensuring manufacturing precision is maintained throughout substrate processing operations.
Data Source
AI summary
A transfer system includes a hand that supports a workpiece to be transported; an arm that moves the hand; a scanning controller that moves the hand by the arm along a scanning direction that intersects sides which are provided to be fixed to the hand and not parallel with each other, such that the sides pass a known reference position in a transfer path of the workpiece; and a position detector that detects a positional deviation of the hand in a direction intersecting the scanning direction, based on a timing at which one of the side reaches the reference position and a timing at which the other side reaches the reference position RP, while the scanning controller is moving the hand.