Transfer Head Array Recesses for Micro Device Height Variance

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current micro device transfer technologies face challenges in efficiently transferring micro devices with varying heights onto receiving substrates without mechanical interference, especially in indirect bonding methods where devices need to be picked up and placed accurately.

Innovation Solution

A transfer head array with recesses in its body to accommodate devices of different heights, combined with electrostatic or adhesive gripping mechanisms to securely transfer micro devices onto a receiving substrate, ensuring accurate placement and avoiding mechanical interference.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If traditional direct bonding or indirect bonding methods are used to transfer micro devices, then the transfer process can be completed, but mechanical interference occurs when devices with varying heights are transferred, reducing manufacturing precision

Engineering Contradiction:
Improveplacement accuracyVSAvoidmechanical interference
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The transfer head introduces a vertical dimension solution by creating recesses at different depths in the body. These recesses accommodate devices of varying heights, allowing all devices to be held at the same vertical level during transfer. This dimensional approach eliminates mechanical interference while maintaining precise placement accuracy.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

Different regions of the transfer head body are designed with different local qualities - specifically, recesses of varying depths at different locations. This allows each device position to be customized for its specific height requirements, preventing mechanical interference while maintaining overall transfer precision.

Inventive Principle:
Principle #3Local quality

2Reliability

If transfer head picks up array of devices and moves them to receiving substrate, then device transfer is achieved, but devices may be misplaced or lost during the transfer process, reducing reliability

Engineering Contradiction:
Improvetransfer reliabilityVSAvoidplacement accuracy
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The transfer head body is segmented into multiple recesses, each capable of independently holding a device. This segmentation allows each device to be securely captured in its designated recess, preventing misplacement or loss during transfer while maintaining precise positioning through the structured arrangement of recesses.

Inventive Principle:
Principle #1Segmentation

3Strength

If electrostatic or adhesive gripping mechanisms are used to secure micro devices, then device grip strength is improved, but the complexity of the transfer head structure increases

Engineering Contradiction:
Improvegrip strengthVSAvoidtransfer head structure
Core Design Contradiction:
StrengthVSDevice complexity

Solution Approach 1:

The patent replaces complex mechanical gripping mechanisms with electrostatic or adhesive gripping fields. This substitution provides strong grip force to secure devices in the recesses without requiring complex mechanical structures, thus maintaining reliability while controlling structural complexity.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the precise and interference-free transfer of micro devices with varying heights onto receiving substrates, enhancing the efficiency and reliability of micro device assembly processes.

Implementation Method 1

electrostatic or adhesive gripping mechanisms to securely transfer micro devices

Methodology Applied
Scientific EffectElectrostatic force: Electrostatics

Implementation Method 2

electrostatic or adhesive gripping mechanisms to securely transfer micro devices

Methodology Applied
Scientific EffectAdhesive force: Adhesive

Data Source

PatentEP3128543B1Transfer head array and transferring method
Publication Date: 2018.09.26 MIKRO MESA TECH
  • EP3128543B1 patent drawingFigure 1
  • EP3128543B1 patent drawingFigure 2
  • EP3128543B1 patent drawingFigure 3

AI summary

A transfer head array (110) includes a body (110) and a plurality of transfer heads (120). The body has a first surface, a second surface opposite to the first surface, and a plurality of recesses (111). The first surface has at least one chucking region and at least one interference avoidance region, and the recesses are separated from each other and are disposed in the interference avoidance region. The transfer heads are disposed on the chucking region.