Transfer Robot Base Unit Embedded in Installation Frame
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Solution Overview
Problem
Existing transfer robots within EFEMs face challenges in accessing substrates across varying heights due to limited vertical and horizontal movement ranges, which restrict their ability to efficiently transfer substrates between supplying and processing units.
Innovation Solution
The transfer robot design includes a base unit with an embedded attachment mechanism that allows for increased vertical movement range by extending the base unit's height to accommodate substrates across multiple stages, ensuring the arm unit can reach both the substrate cassette and aligner device without interference, while maintaining structural integrity and preventing forklift collisions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of moving object
If the base unit height is increased to extend the arm-unit up/down movement range, then the transfer robot can access substrates across multiple stages, but the overall device size increases and structural stability may be compromised
Solution Approach 1:
The base unit is embedded into the installation frame, with a portion of the base unit extending by a specified height from the bottom wall to the attachment member being received within a base receiving recess of the installation frame. This nesting arrangement allows the arm unit to achieve extended vertical movement range while the base unit occupies space within the installation frame structure, avoiding proportional increase in overall device volume.
2Length of moving object
If the base unit is made taller to accommodate the elevation mechanism and increase movement range, then the transfer robot can reach substrates at different heights, but the device becomes more vulnerable to collisions during forklift handling
Solution Approach 1:
The base unit is nested within the installation frame structure, with its lower portion embedded in the base receiving recess. This integration causes the base unit to align substantially with the installation frame outer periphery, eliminating protruding sections that would be vulnerable to forklift collisions during transportation and handling.
Solution Approach 2:
The installation frame serves multiple functions: it provides structural support, houses the embedded base unit, and acts as a protective outer shell that prevents collision damage during forklift handling. This multi-functional design allows the system to achieve extended movement range without increasing vulnerability to external harmful factors.
3Object-affected harmful factors
If the base unit is embedded in the installation frame to prevent forklift collisions, then handling safety is improved, but the arm unit's vertical movement range may be restricted
Solution Approach 1:
The base receiving recess is designed to receive only a portion of the base unit extending by a specified height from the bottom wall to the attachment member. This partial embedding allows the base unit to maintain sufficient height for the elevation mechanism and arm-unit movement range while the embedded portion provides collision protection during forklift handling.
Data Source
AI summary
A transfer robot includes an arm unit having a hand capable of holding one of transferred objects, a base unit mounted to an installation frame and horizontally rotatably supporting the arm unit, an attachment member for attaching the base unit to the installation frame, and an elevation mechanism arranged within the base unit and provided with an elevation member linked to the arm unit. The elevation mechanism is configured to move the arm unit up and down within an arm-unit up/down movement range defined above the base unit by moving the elevation member up and down along a vertical shaft. The base unit is fixed to the installation frame in a state that a portion of the base unit extending by a specified height from a bottom wall of the base unit to the attachment member is embedded in the base receiving recess of the installation frame.