Transfer Robot for Gas Container Handling in Semiconductor Systems
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Solution Overview
Problem
The manual handling of heavy gas containers in semiconductor manufacturing processes is labor-intensive and poses risks, while existing automated systems lack efficient mechanisms for transferring and managing gas containers within gas supply systems.
Innovation Solution
A gas supply system incorporating a transfer robot that automates the handling and transfer of gas containers between loading/unloading stages and gas supply cabinets, featuring a cradle loader, test buffer chamber, storage queue, and gripper mechanisms to securely manage and position gas containers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual handling of gas containers is performed, then flexibility and adaptability are maintained, but labor intensity increases and safety risks arise
Solution Approach 1:
The gas container handling system performs self-service through automated robots that independently complete loading, unloading, and transfer operations. The system includes a loading/unloading robot that automatically loads gas containers into the gas supply cabinet and a transfer robot that autonomously transfers containers between stages, eliminating the need for manual intervention and reducing labor intensity while maintaining operational flexibility
Solution Approach 2:
Manual mechanical handling is replaced with automated robotic systems. The loading/unloading robot uses a gripper mechanism to automatically grasp and load gas containers, while the transfer robot uses similar automated gripping and transfer mechanisms. These robotic systems replace human operators completely, achieving full automation in gas container handling operations
2Productivity
If automated transfer systems are implemented, then productivity increases, but system complexity increases
Solution Approach 1:
The automated transfer system is segmented into distinct functional modules: a loading/unloading stage with a loading/unloading robot, a gas supply cabinet, and a transfer stage with a transfer robot. Each module operates independently with specific functions, allowing the complex overall system to be managed through simpler, specialized components that can be maintained and replaced separately
Solution Approach 2:
The gas supply cabinet serves as an intermediary between the loading/unloading stage and the transfer stage. It receives gas containers from the loading robot, stores them temporarily, and provides them to the transfer robot for distribution to semiconductor manufacturing facilities. This intermediary structure simplifies the coordination between different robotic systems and facilitates efficient transfer operations
3Reliability
If gas containers are handled manually, then system simplicity is maintained, but gas leakage risks increase
Solution Approach 1:
The robotic handling system performs self-service in gripping and transferring gas containers, ensuring consistent and controlled handling. The gripper mechanism on both the loading/unloading robot and transfer robot automatically grasps containers by their bodies, providing uniform gripping force that prevents valve damage and leakage while eliminating the variability and risk associated with manual handling
Solution Approach 2:
Manual mechanical handling that risks valve damage and gas leakage is replaced with automated robotic gripping systems. The robots use controlled mechanical grippers that apply precise, consistent force to container bodies rather than valves, eliminating the risk of human error in handling and significantly improving reliability and leakage prevention
Data Source
AI summary
A gas supply system includes a loading/unloading stage including a cradle loader where a cradle loaded with a gas container is loaded, a test buffer chamber is configured to test the gas container, and a loading/unloading robot configured to transfer the gas container between the cradle and the test buffer chamber. A gas supply stage includes a storage queue configured to temporarily store the gas container, a gas supply cabinet where the gas container is mounted, and a transfer robot configured to transfer the gas container between the test buffer chamber and the storage queue and between the storage queue and the gas supply cabinet.