Transfer Robot Teaching Method Using Optical Index Detection
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Solution Overview
Problem
Conventional teaching methods for transfer robots in processing apparatuses lack reliability and accuracy due to operator variability, requiring visual confirmation and resulting in potential positional deviations during substrate transfer operations.
Innovation Solution
A teaching method utilizing existing detection means, such as optical sensors, to detect index parts on the transfer robot's operating parts, allowing for precise teaching of reference positions for turning and telescopic actions without relying on operator visual confirmation, thereby reducing accuracy fluctuations and enabling quick and reliable teaching.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual teaching is performed by operator visual confirmation, then the teaching operation can be performed, but accuracy fluctuations occur from operator to operator resulting in low reliability
Solution Approach 1:
The patent replaces the manual visual confirmation method with an optical detection system. Detection means (optical sensors) detect index parts on the robot arm to automatically determine reference positions, substituting human visual judgment with precise optical measurement. This eliminates operator variability and ensures consistent, high-precision teaching results.
Solution Approach 2:
The patent introduces index parts as intermediary elements that facilitate automatic detection. These index parts are attached to the robot arm at specific locations, serving as mediators between the robot's mechanical position and the optical detection system. This intermediary enables precise, automated reference position detection without direct human intervention.
2Measurement precision
If detection means are added to improve teaching accuracy, then positioning precision improves, but device complexity and cost increase
Solution Approach 1:
The patent makes the existing detection means, originally designed for substrate position detection, serve a dual function by also using them for robot arm reference position detection during teaching. This multi-functionality approach allows the system to achieve high teaching precision without adding dedicated detection devices, thereby avoiding increased system complexity and cost.
3Productivity
If manual teaching is used, then flexibility in teaching operation is maintained, but teaching time varies and productivity is reduced
Solution Approach 1:
The patent implements self-service teaching where the robot arm automatically guides itself through the teaching process. The detection means automatically detect the index parts on the robot arm to determine reference positions without requiring manual operation. This self-service approach standardizes the teaching process, reduces teaching time, and improves productivity by eliminating operator-dependent variations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method ensures high accuracy and reliability in teaching transfer actions, reduces operator-dependent errors, and allows for cost-effective implementation without increasing the number of constituent parts, while enabling teaching under vacuum conditions.
Implementation Method 1
detecting at least one index part provided in advance on an operating part of the transfer robot by using at least one detection means disposed so as to detect the substrate
Data Source
AI summary
There is provided a teaching method for a transfer robot which is capable of quickly performing teaching at high reliability. Relative to a transfer robot which, in a state in which a substrate to be processed in a plurality of processing chambers is supported, transfers the substrate to a predetermined position by turning and telescopic action on the same plane, teaching is made of the transfer actions. At this time, by using at least one detection means that is disposed so as to detect the substrate when the substrate is transferred among the processing chambers, the transfer robot is caused to perform transfer action. At least one index part provided in advance on an operating part of the transfer robot is detected by the detection means. From this detection position, a reference position which serves as an origin of at least one of the turning action and the telescopic action is taught.