Transfer Robot Control via Single Command Synthesis
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Solution Overview
Problem
Conventional methods for controlling transfer robots in processing apparatuses result in increased communication time and transfer time due to the need for multiple commands and communication between the robot and host computer, leading to reduced throughput.
Innovation Solution
A method where a series of transfer robot actions are performed using a single command, allowing for reduced communication time and eliminating the need to stop the robot at switching points, with telescopic and turning actions being locally synthesized, and substrate presence detection enabling earlier processing chamber isolation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple commands are used to control transfer robot actions, then the robot can perform precise sequential operations, but the communication time and transfer time increase
Solution Approach 1:
Multiple separate commands (pick, go_to, place) are merged into a single integrated command that performs all transfer operations atomically. This reduces communication overhead while maintaining control precision through unified command processing.
Solution Approach 2:
The transfer robot operations are executed continuously without interruption for communication feedback. The single command approach enables continuous action by eliminating repeated communication cycles, thereby reducing total transfer time while maintaining operational precision.
2Manufacturing precision
If the transfer robot stops at switching points between telescopic and turning actions, then the robot can accurately transition between movements, but the transfer time increases
Solution Approach 1:
The telescopic and turning actions are executed continuously without stopping at switching points. The robot maintains motion continuity by pre-calculating and smoothly transitioning between movement types, preserving positioning accuracy while eliminating idle time.
Solution Approach 2:
The robot dynamically adjusts its movement mode (telescopic vs. turning) without discrete stops. By making the switching point transient and integrating the transition into the continuous motion path, the system maintains both accuracy and speed.
3Reliability
If processing chamber isolation waits for transfer completion, then substrate transfer accuracy is ensured, but the processing throughput decreases
Solution Approach 1:
The processing chamber isolation is initiated in advance based on predicted transfer completion timing, rather than waiting for actual completion. This preliminary action ensures transfer reliability is maintained while maximizing throughput by reducing idle time.
Solution Approach 2:
The system uses real-time position feedback to determine when isolation can be safely initiated. By monitoring robot position and trajectory, the system triggers isolation at the optimal moment, ensuring reliability while minimizing delay to throughput.
Data Source
AI summary
A method of controlling a transfer robot is provided, in which method the communication time of the transfer robot can be reduced and the transfer time of a substrate can be shortened. A series of actions of the transfer robot when a substrate that is present in a processing chamber is transferred to a predetermined position in a processing chamber, are performed by a single command. The series of actions may include a swap action in which, after having taken out by a robot hand the substrate that is present in the processing chamber, a substrate that is different from the substrate is handed over by a robot hand to a predetermined position on the processing chamber.