Transistor Substrate With Segmented Gate Insulation

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Solution Overview

Problem

The existing organic light emitting display panels face limitations in enhancing the characteristics of switching and driving transistors due to the thinness of the gate insulation layer, which affects storage capacitance and leads to defects during the etching process, resulting in reduced performance and increased complexity in manufacturing.

Innovation Solution

The solution involves a transistor substrate where both ends of the oxide semiconductor transistors are covered by an insulation layer, with the gate of the driving transistor and switching transistor on different layers, and the use of ultraviolet (UV) irradiation to form conductive areas without etching the gate insulation layer, thereby enhancing the storage capacitance and reducing manufacturing defects.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If the thickness of the gate insulation layer is reduced to increase storage capacitance, then the storage capacitance is increased, but the manufacturing precision is reduced due to etching defects

Engineering Contradiction:
Improvestorage capacitanceVSAvoidetching process quality
Core Design Contradiction:
Quantity of substanceVSManufacturing precision

Solution Approach 1:

The gate insulation layer is segmented into two independent layers with different thicknesses. The first gate insulation layer is thinner to increase storage capacitance, while the second gate insulation layer is thicker to provide sufficient margin for etching processes, thereby maintaining manufacturing precision and reducing etching defects.

Inventive Principle:
Principle #1Segmentation

2Quantity of substance

If additional metal layers are added to increase storage capacitance, then the storage capacitance is increased, but the device complexity and manufacturing process are increased

Engineering Contradiction:
Improvestorage capacitanceVSAvoidnumber of metal layers
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

Instead of adding additional metal layers to increase storage capacitance, the invention segments the gate insulation layer into two layers with different thicknesses. This approach increases storage capacitance through the optimized insulation layer structure without requiring additional metal layers, thereby avoiding increased device complexity and manufacturing process steps.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach improves the driving characteristics of the transistors, increases storage capacitance, and simplifies the manufacturing process by eliminating the need for additional metal layers and reducing defects caused by etching, leading to enhanced performance and reliability of the organic light emitting display panels.

Implementation Method 1

the use of ultraviolet (UV) irradiation to form conductive areas without etching the gate insulation layer

Methodology Applied
Scientific EffectPhotoconductivity: Photoconductivity

Data Source

PatentEP3331015B1Transistor substrate, organic light emitting display panel including the same, method of manufacturing the transistor substrate, and organic light emitting display device including the organic light emitting display panel
Publication Date: 2020.11.04 LG DISPLAY CO LTD
  • EP3331015B1 patent drawingFigure 1~2
  • EP3331015B1 patent drawingFigure 3(a)~4
  • EP3331015B1 patent drawingFigure 5~6

AI summary

Disclosed are a transistor substrate, an organic light emitting display panel including the same, a method of manufacturing the transistor substrate, and an organic light emitting display device including the organic light emitting display panel, in which a driving transistor (Tdr) and a switching transistor (Tsw) are provided and each include an oxide semiconductor of which both ends are covered by an insulation layer (103), and a gate (124) of the driving transistor (Tdr) and a gate (114) of the switching transistor (Tsw) are provided on different layers.