Transmissive Final Lens for X-ray and Light Detection
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Solution Overview
Problem
Charged particle optical columns in dual beam systems face challenges in achieving optimal imaging due to the need for a large working distance, which degrades optics, and current through-the-lens detectors are not effective for collecting X-rays and light emissions.
Innovation Solution
A charged particle beam system with a final lens portion that is transmissive to X-rays and light, allowing for detection while maintaining a small working distance, using electrodes made of low atomic number materials to minimize absorption and maximize transmission.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a large working distance is used to accommodate detectors and accessories, then space for detection is improved, but optical quality deteriorates
Solution Approach 1:
The patent positions detectors at oblique angles relative to the sample rather than directly above it, utilizing the lateral dimension to accommodate detection space without increasing the vertical working distance. This allows detectors to be positioned away from the sample in a direction that does not compromise optical quality.
Solution Approach 2:
The patent integrates detectors within or adjacent to existing column structures, nesting detection components within the available space of the dual beam system rather than requiring separate external positioning space.
2Measurement precision
If a small working distance is used to improve optical quality, then imaging resolution is improved, but detection capability deteriorates due to lack of space for detectors
Solution Approach 1:
The patent positions detectors at oblique angles relative to the sample rather than directly above it, utilizing the lateral dimension to accommodate detection space without increasing the vertical working distance. This allows detectors to be positioned away from the sample in a direction that does not compromise optical quality.
3Reliability
If conventional electrodes are used in the final lens, then beam focusing is achieved, but X-ray and light transmission is blocked
Solution Approach 1:
The patent changes the material parameter of the final lens electrodes from conventional high atomic number materials to low atomic number materials (such as beryllium, aluminum, or carbon). This parameter change allows the electrodes to maintain their electrical function for beam focusing while simultaneously becoming transparent to X-rays and light, eliminating the blocking effect.
Solution Approach 2:
The patent employs composite construction for the final lens, combining low atomic number materials that are transparent to emissions with conductive coatings or structures that maintain electrical functionality for beam focusing, achieving both transmission and focusing requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables better optical quality by allowing for smaller spot sizes and improved detection of X-rays and light emissions at smaller working distances, enhancing imaging and analysis capabilities.
Implementation Method 1
A charged particle optical column includes an electrostatic final lens in which at least a portion of each electrode in the final lens is composed of material having a low atomic number to permit transmission of X-rays and/or light from a sample spaced a small working distance below the final lens.
Implementation Method 2
material having a low atomic number to permit transmission of X-rays and/or light from a sample
Data Source
AI summary
A transmissive lens in a charged particle beam column for detecting X-rays and light is provided. The final lens may include elements that are transmissive for X-rays for EDS imaging and analysis or elements that are transmissive for light for cathodoluminescent (CL) imaging and analysis. The final lens may be constructed and arranged to include elements that are transmissive for both X-rays and light for combined EDS and CL imaging and analysis.