Transparent Holding Table for Workpiece Groove Alignment
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Solution Overview
Problem
In the process of cutting workpieces with projected dicing lines, it is challenging to ensure that the widthwise central lines of first and second processed grooves are in conformity, as images captured from above do not clearly show the second processed grooves positioned closer to the reverse side, making it difficult to confirm alignment and conformity.
Innovation Solution
A method involving a holding table transparent to visible light, where images of processed grooves on both sides of the workpiece are captured using appropriate image capturing units, allowing for detection and correction of central line positions to ensure alignment, with first and second cutting blades forming grooves of different thicknesses to achieve conformity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If images are captured from above the workpiece to detect processed groove positions, then the detection process is simple, but the second processed grooves positioned closer to the reverse side cannot be clearly observed
Solution Approach 1:
The patent introduces a transparent holding table that allows optical transmission, enabling image capture from the reverse side dimension. The lower image capturing unit positioned below the holding table captures images of processed grooves through the transparent table, providing visibility of grooves that are not observable from the upper dimension alone.
2Stability of the object's composition
If the face side of the workpiece is held under suction on the chuck table, then the workpiece is securely held, but alignment marks on the face side cannot be directly observed for alignment
Solution Approach 1:
The transparent holding table serves as an intermediary that allows optical transmission between the lower image capturing unit and the alignment marks on the workpiece face side. This intermediary enables alignment observation without compromising the suction holding of the workpiece on the chuck table.
3Measurement precision
If a visible-light camera is used to capture images through the transparent holding table, then alignment marks are clearly visible, but the camera must be disposed below the holding table increasing device complexity
Solution Approach 1:
The transparent holding table serves multiple functions: it holds the workpiece during cutting, allows optical transmission for image capture, and provides structural support. This multi-functionality reduces the need for separate components and simplifies the overall device structure despite the lower camera placement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method ensures accurate alignment and conformity of central lines in both first and second processed grooves, enhancing the precision and reliability of the cutting process, particularly effective for workpieces made of hard materials or those requiring stepwise cutting.
Implementation Method 1
a holding table having a region made of a transparent material
Data Source
AI summary
A method of processing a workpiece includes holding a face side of the workpiece on a holding table having a region made of a transparent material and forming a processed groove in the workpiece with a cutting blade. The forming a processed groove includes capturing an image of the processed groove on a reverse side and the face side of the workpiece, and detecting whether a position of a first central line of the processed groove on the reverse side and a position of a second central line of the processed groove on the face side are in conformity in a predetermined plane. If the positions of the first and second central lines are not in conformity, then the forming a processed groove further has correcting a position of the center of the cutting blade in order to bring the positions of the first and second central lines into conformity.