Transparent Sample Base for Simultaneous Electron and Optical Microscopy
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Solution Overview
Problem
Current methods require separate sample preparation for electron microscopes and optical microscopes, leading to increased time and effort in observing the same sample with both types of microscopes due to the inability of existing detectors and sample bases to transmit light effectively.
Innovation Solution
A sample base and charged particle beam device that incorporates a transparent detection element capable of converting charged particle beams to light, allowing for simultaneous observation by both electron microscopes and optical microscopes using a single sample, with a detection element that emits light in the visible, ultraviolet, or infrared range, enabling transmission of optical signals for optical microscopy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a mesh sample base with holes is used for electron microscope observation, then transmission electron beam detection is enabled, but sample mounting becomes extremely difficult and optical light transmission is blocked
Solution Approach 1:
The patent merges the electron detector and sample base into a single integrated unit. The detector is positioned directly beneath the sample base, allowing simultaneous electron beam detection and optical light transmission through the same sample mounting surface, eliminating the need for separate mesh structures
Solution Approach 2:
The sample base is designed to serve multiple functions: it acts as both a mechanical support for sample mounting and a transmission window for optical light. The detector beneath it simultaneously performs electron beam detection, creating a multi-functional system that eliminates the need for separate specialized components
2Measurement precision
If a mesh sample base is used for electron microscope observation, then transmission electron beam detection is enabled, but optical light transmission is blocked
Solution Approach 1:
The patent combines electron detection and optical transmission functions into a single integrated configuration. The detector is positioned directly beneath the sample base, allowing both electron beams and optical light to pass through the same sample area simultaneously without interference from mesh structures
Solution Approach 2:
The sample base acts as an intermediary component that is transparent to both electron beams and optical light. It provides mechanical support for the sample while allowing transmission of both types of radiation to their respective detectors, eliminating the need for separate mesh and window structures
3Reliability
If separate sample bases are used for electron and optical microscopes, then each microscope can observe its optimized sample format, but sample preparation time increases
Solution Approach 1:
The sample base is designed with universal compatibility for both electron and optical microscopy. It provides optimized sample support for electron beam observation while simultaneously serving as a transmission window for optical light, allowing a single sample preparation to serve both observation modes
Solution Approach 2:
The patent merges the requirements of two separate sample preparation systems into a single integrated sample base design. By combining electron detection capability and optical transmission in one unit, it eliminates the need to prepare separate samples for different microscopy techniques
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient observation of the same sample using both charged particle beam and optical microscopy techniques without the need for separate sample preparation, reducing time and effort while providing high-resolution images from both modalities.
Implementation Method 1
a transparent detection element capable of converting charged particle beams to light
Implementation Method 2
a transparent member that supports the detection element
Data Source
Figure 1
Figure 2
Figure 3A~3B
AI summary
This charged particle beam device irradiates a primary charged particle beam generated from a charged particle microscope (601) onto a sample (6) arranged on a light-emitting member (500) that makes up at least a part of a sample base (600), and, in addition to obtaining charged particle microscope images by the light-emitting member (500) detecting charged particles transmitted through or scattered inside the sample (6), obtains optical microscope images by means of an optical microscope (602) while the sample (6) is still arranged on the sample platform (600).