Transparent Storage Capacitor for Display Panels
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional display panels with storage capacitors made of light blocking and metal conductive layers have poor light transmittance, limiting their application in transparent displays.
Innovation Solution
A display panel design featuring a conductive and transparent first plate with a dielectric layer, and a second plate made of indium tin oxide, both covered by a protective aluminum oxide layer, forming a transparent storage capacitor. The process involves forming a buffer layer, active layer, gate insulating and metal layers, and interlayer dielectric layers, with thermal annealing to diffuse aluminum and oxygen atoms, creating a conductive and transparent first plate and protective layers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional light blocking layer and metal conductive layer are used to form storage capacitor, then the storage capacitor has good electrical conductivity, but the light transmittance is poor
Solution Approach 1:
The patent changes the material parameters from conventional metal conductive layers to transparent conductive oxide materials (IGZO, ITO, ZnO). By adjusting the composition ratios (In:Ga:Zn = 1:(0.1-0.5):(0.1-0.5)) and controlling the thickness (50-200nm), the material achieves both high electrical conductivity and high light transmittance, resolving the contradiction between electrical performance and optical transparency
Solution Approach 2:
The patent employs composite transparent conductive oxide materials combining multiple elements (Indium, Gallium, Zinc, Oxygen) to create a material system that simultaneously provides electrical conductivity and optical transparency. The composite structure of IGZO with ITO or ZnO layers creates synergistic effects that maintain both electrical and optical properties
2Reliability
If aluminum oxide layer is added to form protective layer and dielectric layer, then the thermal stability and storage capacitance are improved, but the device structure becomes more complex
Solution Approach 1:
The aluminum oxide layer serves multiple functions simultaneously: (1) as a protective layer preventing oxygen diffusion and maintaining conductivity, (2) as a dielectric layer forming the storage capacitor insulator, and (3) as a barrier layer preventing material intermixing. This multi-functionality reduces the need for separate dedicated layers, thereby limiting the increase in structural complexity while achieving improved thermal stability and storage capacitance
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution results in a transparent storage capacitor that can be widely applied in transparent displays, with improved thermal stability and increased storage capacitance per unit area due to the use of indium gallium zinc oxide and aluminum oxide as transparent conductive materials.
Implementation Method 1
thermal annealing to diffuse aluminum and oxygen atoms
Implementation Method 2
diffuse aluminum and oxygen atoms
Implementation Method 3
the structure of the aluminum oxide is dense, and the conductor layer and the first plate can be well protected, so that the conductor layer and the first plate are protected from a subsequent thermal process
Data Source
AI summary
A display panel and a method of manufacturing of the same are provided. The display panel includes a substrate and an active layer disposed on the substrate. The active layer includes a conductive and transparent first plate, and the first plate is provided with a dielectric layer. The dielectric layer is provided with a second plate, and the second plate and the dielectric layer are made of a transparent conductive material.