Transparent Substrate Posture Detection Using Dual Light Time Difference
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Solution Overview
Problem
In semiconductor and display device manufacturing, substrates undergo various processes that require precise handling and alignment, but existing technologies face challenges in accurately determining and maintaining the posture of transparent rectangular substrates during transport and processing, especially when the substrates are made of transparent materials.
Innovation Solution
A substrate treatment apparatus is developed, featuring a transport part, substrate support, light generators, and a controller that uses two different lights to determine the posture of a transparent rectangular substrate by sensing the time difference between when each light is not transmitted through its edges, allowing for precise alignment and seating on a substrate support in a default posture.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Difficulty of detecting and measuring
If light transmission sensing is used to detect transparent substrate edges, then detection capability is improved, but measurement precision deteriorates because transparent materials allow light to pass through without clear edge definition
Solution Approach 1:
The system divides the detection task into multiple segments by using two different light sources (first and second lights) with different wavelengths or properties. Each light source detects different aspects of the substrate edge, and the controller combines these segmented detection results to achieve precise posture determination that overcomes the transparency issue.
Solution Approach 2:
The system changes the detection parameter by using multiple light sources with different characteristics (wavelengths, intensities, or types). By varying the light parameters, the system can detect edge positions more accurately on transparent substrates, as different light parameters interact differently with the transparent material and its edges.
2Device complexity
If manual alignment methods are used for substrate positioning, then device complexity is reduced, but manufacturing precision deteriorates due to inability to achieve accurate default posture alignment
Solution Approach 1:
The system replaces manual mechanical alignment operations with an automated optical detection and control system. The light sources and sensors detect substrate position and posture automatically, and the controller adjusts the substrate transport to achieve precise alignment, eliminating the need for manual intervention while significantly improving alignment accuracy.
Solution Approach 2:
The system implements a feedback mechanism where the light sources continuously monitor the substrate's position and posture during transport. The controller receives this feedback information and makes real-time adjustments to the substrate transport mechanism, ensuring the substrate achieves and maintains the correct default posture alignment automatically.
3Productivity
If substrate transport speed is increased to improve productivity, then manufacturing efficiency is improved, but measurement precision deteriorates due to reduced time for accurate posture detection and alignment
Solution Approach 1:
The system performs preliminary detection actions by positioning the light sources and sensors to detect substrate posture at optimal points during transport. The controller anticipates the substrate's position and makes preliminary alignment adjustments before the substrate reaches the processing position, ensuring accurate posture detection even at higher transport speeds.
Solution Approach 2:
The system adopts a dynamic detection and control approach where the light sources and sensors are positioned to work effectively at various transport speeds. The controller dynamically adjusts detection parameters and transport control based on the actual transport speed, maintaining measurement precision whether the substrate moves slowly or quickly through the system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables accurate determination and correction of the substrate's posture, ensuring proper alignment and processing, which enhances the efficiency and reliability of semiconductor and display device manufacturing by maintaining the substrate's default posture during transport and processing.
Implementation Method 1
light generators configured to irradiate two different lights onto the transparent rectangular substrate, which is moving, and sense the irradiated lights
Implementation Method 2
the controller determines the posture of the transparent rectangular substrate with respect to the default posture using a time difference between a time point at which a first light of the two different lights is not transmitted through an edge of the transparent rectangular substrate and a time point at which a second light of the two different lights is not transmitted through the edge of the transparent rectangular substrate
Data Source
AI summary
A substrate treatment apparatus includes a transport part to transport a transparent rectangular substrate, a substrate support part to support the substrate, light generators to irradiate two different lights onto the moving substrate, and sense the irradiated lights, and a controller to determine a posture of the substrate with reference to the sensed lights and control the transport part such that the substrate is seated on the substrate support part in a default posture that is preset. The controller determines the posture of the transparent rectangular substrate with respect to the default posture using a time difference between a time point at which a first light of the two different lights is not transmitted through an edge of the transparent rectangular substrate and a time point at which a second light of the two different lights is not transmitted through the edge of the transparent rectangular substrate.