Transport Arm Squeeze Packing for Heated Substrate Handling
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Solution Overview
Problem
Existing transport arms are not designed to handle and transport substrates with warps caused by heat treatment, leading to poor detachability and adherence issues when dealing with heated substrates.
Innovation Solution
A transport arm equipped with a holding unit using vacuum adsorption and a squeeze packing adsorption member, which allows for secure holding and easy detachment of substrates with warps, particularly those heated during processes like wafer handling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Force
If rubber (pad) is used for the adsorption unit in the transport arm, then adhesive force and friction coefficient are large, but this causes poor detachability and the substrate adheres to the transport arm when heated
Solution Approach 1:
The patent changes the material parameter of the adsorption unit from rubber to a material with low friction coefficient and low adhesive force. This parameter change allows the transport arm to maintain sufficient holding force while enabling easy detachment, especially when transporting heated substrates that would otherwise adhere strongly to rubber surfaces.
2Reliability
If the transport arm is configured for room temperature substrates, then it works well for flat substrates, but it cannot properly handle heated substrates with warp
Solution Approach 1:
The patent modifies the surface properties of the adsorption unit by using a material with low friction coefficient and low adhesive force, which changes how the substrate interacts with the transport arm. This parameter change enables the system to accommodate heated substrates with warp that would otherwise be incompatible with conventional rubber-based adsorption units designed for room temperature operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables stable transportation and detachment of substrates with warps, ensuring safe handling from one process to another without adhering to the transport arm.
Implementation Method 1
a holding unit that holds the substrate by way of vacuum adsorption
Data Source
AI summary
A transport arm including a holding unit that holds a substrate by vacuum adsorption. The holding unit has an air discharge port and an adsorption member formed so as to surround the air discharge port. The adsorption member is a squeeze packing.