Trench Capacitor Layout With Conductive Plug Shielding
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Solution Overview
Problem
Existing electronic devices face challenges in increasing capacitor capacity without expanding their area, leading to reduced reliability due to capacitive coupling and metal atom diffusion issues, which affects the dynamic range and image quality in imaging devices.
Innovation Solution
The design incorporates a capacitor with a first lower electrode along the inner wall of trenches, a dielectric layer, and an upper electrode, along with a conductive plug positioned between the insulating layer and the trench, which electrostatically shields capacitors and reduces metal atom diffusion, thereby increasing capacity and reliability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If capacitor area is increased to increase capacity, then capacitor capacity is improved, but device area occupied increases
Solution Approach 1:
The patent transitions from a planar capacitor structure to a three-dimensional structure by forming trenches in the insulating layer and placing lower electrodes along the trench inner walls. This vertical development into the third dimension allows significantly increased capacitor capacity without proportionally increasing the planar area occupied on the device surface.
Solution Approach 2:
The capacitor structure embeds multiple components within each other: the lower electrode is nested along the trench inner wall, the dielectric layer is nested on the lower electrode, and the upper electrode is nested on the dielectric layer. This nested configuration maximizes the use of available space within the trench structure, increasing capacity while minimizing area.
2Quantity of substance
If capacitor capacity is increased, then dynamic range is improved, but capacitive coupling occurs reducing reliability
Solution Approach 1:
The patent extracts the problematic capacitive coupling effect by introducing a conductive plug that is surrounded by the insulating layer and positioned between the upper surface and the trench. This conductive plug acts as a shielding element that isolates the capacitor from external electromagnetic interference and prevents capacitive coupling with adjacent structures, thereby maintaining reliability while allowing high capacity.
3Quantity of substance
If capacitor capacity is increased, then dynamic range is improved, but metal atom diffusion occurs reducing reliability
Solution Approach 1:
The patent introduces a dielectric layer as an intermediary substance between the lower electrode and the upper electrode. This dielectric layer serves as a barrier that prevents metal atom diffusion from the lower electrode to the upper electrode, maintaining material integrity and device reliability while allowing the capacitor to achieve high capacity through its three-dimensional structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for a high-capacity capacitor in a compact area, reducing capacitive coupling and enhancing the reliability and dynamic range of electronic devices, particularly in imaging applications.
Implementation Method 1
a first conductive plug, at least part of which is surrounded by the insulating layer... At least part of the first conductive plug is positioned between an upper surface of the insulating layer and a lowermost portion of the at least one trench
Data Source
AI summary
An electronic device includes: a capacitor; an insulating layer; at feast one trench provided in the insulating layer; and a first conductive plug, at least part of which is surrounded by the insulating layer. The capacitor includes: a first lower electrode provided along an inner wall of the at least one trench, a dielectric layer provided on the first lower electrode, and an upper electrode provided on the dielectric layer. At least part of the first conductive plug is positioned between an upper surface of the insulating layer and a lowermost portion of the at least one trench.