Trench-Shaped Programmable Material Memory Cell for Compact Arrays

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Solution Overview

Problem

Current memory cell technologies, such as programmable metallization cells (PMCs), require improved designs for enhanced performance and integration in memory cell arrays, particularly in reducing the number of masking steps and achieving compactness for high-density circuitry.

Innovation Solution

The development of memory cells with a trench-shaped programmable material structure, an ion source material comprising copper and tellurium, and a second electrode extending into the trench-shaped programmable material, allowing for reversible conductive bridge formation and reduced resistive states, enabling fewer masking steps and compact device architecture.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If conventional PMC structures are used with standard fabrication processes, then device functionality is achieved, but the number of masking steps increases and device compactness is reduced

Engineering Contradiction:
Improvenumber of masking stepsVSAvoidstructural complexity
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The patent implements nesting by placing the ion source material and second electrode inside the trench-shaped programmable material structure. The second electrode extends into the opening defined by the trench, and the ion source material is positioned between the first electrode and the programmable material within the trench structure. This nested configuration allows multiple components to occupy overlapping spatial footprints, reducing the overall device area and simplifying the fabrication process by enabling fewer masking steps.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Productivity

If memory cells are designed for high-density integration, then circuit density is improved, but device area and structural complexity increase

Engineering Contradiction:
Improveintegration densityVSAvoiddevice area
Core Design Contradiction:
ProductivityVSArea of stationary object

Solution Approach 1:

The patent transitions from a planar two-dimensional layout to a three-dimensional vertical structure by creating a trench-shaped programmable material that extends downward from the surface. The ion source material and second electrode are positioned within this vertical trench, utilizing the depth dimension rather than only lateral space. This vertical stacking approach enables higher integration density by packing more functional elements into a smaller lateral footprint, effectively trading area for volume utilization.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enables the creation of more integrated and efficient memory cells with fewer processing steps, facilitating their use in high-density memory arrays and integrated circuitry, while maintaining reversible resistive states for data storage.

Implementation Method 1

A suitable voltage applied across the electrodes can generate current-conductive super-ionic clusters or conducting filaments. Such may result from ion transport through the ion conductive material which grows the clusters/filaments from one of the electrodes (the cathode) and through the ion conductive material.

Methodology Applied
Scientific EffectIon transport: Ion Repulsion/Attraction

Data Source

PatentEP2769414B1Memory cell array
Publication Date: 2016.12.07 MICRON TECHNOLOGY INC
  • EP2769414B1 patent drawingFigure 1~2
  • EP2769414B1 patent drawingFigure 3
  • EP2769414B1 patent drawingFigure 4

AI summary

Some embodiments include memory cells. The memory cells may have a first electrode, and a trench-shaped programmable material structure over the first electrode. The trench-shape defines an opening. The programmable material may be configured to reversibly retain a conductive bridge. The memory cell may have an ion source material directly against the programmable material, and may have a second electrode within the opening defined by the trench-shaped programmable material. Some embodiments include arrays of memory cells. The arrays may have first electrically conductive lines, and trench-shaped programmable material structures over the first lines. The trench- shaped structures may define openings within them. Ion source material may be directly against the programmable material, and second electrically conductive lines may be over the ion source material and within the openings defined by the trench-shaped structures.